JPS6431477A - Finely working method for superconductor - Google Patents

Finely working method for superconductor

Info

Publication number
JPS6431477A
JPS6431477A JP62188009A JP18800987A JPS6431477A JP S6431477 A JPS6431477 A JP S6431477A JP 62188009 A JP62188009 A JP 62188009A JP 18800987 A JP18800987 A JP 18800987A JP S6431477 A JPS6431477 A JP S6431477A
Authority
JP
Japan
Prior art keywords
superconductor
diameter
recess
width
bridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62188009A
Other languages
Japanese (ja)
Inventor
Ko Azuma
Katsuyuki Kaiho
Mikio Nakagawa
Tsukasa Kono
Yoshimitsu Ikeno
Nobuyuki Sadakata
Masaru Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Fujikura Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP62188009A priority Critical patent/JPS6431477A/en
Publication of JPS6431477A publication Critical patent/JPS6431477A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To suppress the irregularity of characteristics of a Josephson element and to simplify the steps of forming the bridge of the element by irradiating a superconductor or an article made of the superconductor with a focused electron beam having a predetermined diameter to form a recess on the superconductor or the article made of the superconductor. CONSTITUTION:A superconducting thin film 11 is irradiated at a longitudinal center with a focused electron beam having 0.5 or less of diameter, such as 0.02mum while moving laterally to form a recess (width: 0.1mum, depth: 0.1mum) extending axially at the longitudinal center of the film 11. The beam is radiated by a scanning electron microscope, and the irradiating time is 30sec, and the scanning width (moving width of the beam) is set to 50mum. A recess 12 is formed on the film 11, and a bridge 13 is formed under the recess 12. The diameter of the beam is set to 0.02mum, but if it is 0.5mum or less, any beam diameter may be set. If the diameter of the beam is set to 0.5mum or more, the width of the groove 2, i.e., the length of the bridge 3 possibly becomes 1mum or more.
JP62188009A 1987-07-28 1987-07-28 Finely working method for superconductor Pending JPS6431477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62188009A JPS6431477A (en) 1987-07-28 1987-07-28 Finely working method for superconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62188009A JPS6431477A (en) 1987-07-28 1987-07-28 Finely working method for superconductor

Publications (1)

Publication Number Publication Date
JPS6431477A true JPS6431477A (en) 1989-02-01

Family

ID=16216048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62188009A Pending JPS6431477A (en) 1987-07-28 1987-07-28 Finely working method for superconductor

Country Status (1)

Country Link
JP (1) JPS6431477A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08264849A (en) * 1995-11-27 1996-10-11 Matsushita Electric Ind Co Ltd Superconducting element manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08264849A (en) * 1995-11-27 1996-10-11 Matsushita Electric Ind Co Ltd Superconducting element manufacturing method

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