JPS6431990A - Titanium electroplating bath and plating method using same - Google Patents
Titanium electroplating bath and plating method using sameInfo
- Publication number
- JPS6431990A JPS6431990A JP18956487A JP18956487A JPS6431990A JP S6431990 A JPS6431990 A JP S6431990A JP 18956487 A JP18956487 A JP 18956487A JP 18956487 A JP18956487 A JP 18956487A JP S6431990 A JPS6431990 A JP S6431990A
- Authority
- JP
- Japan
- Prior art keywords
- plating bath
- electroplating
- plating
- dense
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 title abstract 8
- 238000009713 electroplating Methods 0.000 title abstract 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 229910052719 titanium Inorganic materials 0.000 title 1
- 239000010936 titanium Substances 0.000 title 1
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 abstract 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 abstract 3
- 150000004820 halides Chemical class 0.000 abstract 2
- 239000003960 organic solvent Substances 0.000 abstract 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910010062 TiCl3 Inorganic materials 0.000 abstract 1
- -1 TiCl3 and TiCl4 Chemical class 0.000 abstract 1
- 229910003074 TiCl4 Inorganic materials 0.000 abstract 1
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 150000001805 chlorine compounds Chemical class 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 abstract 1
- YONPGGFAJWQGJC-UHFFFAOYSA-K titanium(iii) chloride Chemical compound Cl[Ti](Cl)Cl YONPGGFAJWQGJC-UHFFFAOYSA-K 0.000 abstract 1
- 239000008096 xylene Substances 0.000 abstract 1
Landscapes
- Electroplating And Plating Baths Therefor (AREA)
Abstract
PURPOSE:To form a dense and uniform Ti plating film at low temp., by carrying out electroplating in a dry and oxygen-free atmosphere by using a plating bath composed of Ti chloride, alkylpyridinium halide, and specific organic solvent and also using direct current or pulse current. CONSTITUTION:Electroplating is applied to the cathode to be treated in an oxygen-free atmosphere of dry N2, Ar, etc., by means of direct or pulse current in 0.1-10A/dm<2> current density by using a soluble anode made of Ti and also using, as a plating bath for Ti electroplating, a molten salt plating bath consisting of 50-80mole%, in total, of one or two kinds among Ti chlorides, such as TiCl3 and TiCl4, 20-50mole% of 1-4C alkylpyridinium halide of alkyl proup, and <=75vol.% of organic solvent, such as toluene, xylene, and benzene. At this time, by using the plating bath of the above composition, the dense and uniform Ti plating film can be formed by means of a plating bath with a relatively low temp. of 20-150 deg.C without causing oxidation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18956487A JPS6431990A (en) | 1987-07-29 | 1987-07-29 | Titanium electroplating bath and plating method using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18956487A JPS6431990A (en) | 1987-07-29 | 1987-07-29 | Titanium electroplating bath and plating method using same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6431990A true JPS6431990A (en) | 1989-02-02 |
Family
ID=16243445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18956487A Pending JPS6431990A (en) | 1987-07-29 | 1987-07-29 | Titanium electroplating bath and plating method using same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6431990A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010036758A3 (en) * | 2008-09-29 | 2010-06-03 | Hurst William D | Alloy coating apparatus and metalliding method |
| CN103147096A (en) * | 2013-03-28 | 2013-06-12 | 攀钢集团攀枝花钢铁研究院有限公司 | Method for preparing molten-salt electrolyte containing low-valent titanium chloride and method for extracting titanium |
| JP2013119647A (en) * | 2011-12-07 | 2013-06-17 | Jfe Steel Corp | Method for manufacturing surface-treated steel sheet |
| WO2017159324A1 (en) * | 2016-03-18 | 2017-09-21 | 住友電気工業株式会社 | Conductive material and method for producing same |
-
1987
- 1987-07-29 JP JP18956487A patent/JPS6431990A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010036758A3 (en) * | 2008-09-29 | 2010-06-03 | Hurst William D | Alloy coating apparatus and metalliding method |
| KR101314380B1 (en) * | 2008-09-29 | 2013-10-04 | 엑스파셜 유니버셜 테크놀로지스, 인크. | Alloy coating apparatus and metalliding method |
| JP2013119647A (en) * | 2011-12-07 | 2013-06-17 | Jfe Steel Corp | Method for manufacturing surface-treated steel sheet |
| CN103147096A (en) * | 2013-03-28 | 2013-06-12 | 攀钢集团攀枝花钢铁研究院有限公司 | Method for preparing molten-salt electrolyte containing low-valent titanium chloride and method for extracting titanium |
| CN103147096B (en) * | 2013-03-28 | 2015-07-01 | 攀钢集团攀枝花钢铁研究院有限公司 | Method for preparing molten-salt electrolyte containing low-valent titanium chloride and method for extracting titanium |
| WO2017159324A1 (en) * | 2016-03-18 | 2017-09-21 | 住友電気工業株式会社 | Conductive material and method for producing same |
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