JPS6433030A - Ultraviolet ray-transmittable low thermal expansion glass - Google Patents

Ultraviolet ray-transmittable low thermal expansion glass

Info

Publication number
JPS6433030A
JPS6433030A JP18734987A JP18734987A JPS6433030A JP S6433030 A JPS6433030 A JP S6433030A JP 18734987 A JP18734987 A JP 18734987A JP 18734987 A JP18734987 A JP 18734987A JP S6433030 A JPS6433030 A JP S6433030A
Authority
JP
Japan
Prior art keywords
glass
zro2
thermal expansion
transmittable
ultraviolet ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18734987A
Other languages
Japanese (ja)
Inventor
Toshiaki Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP18734987A priority Critical patent/JPS6433030A/en
Publication of JPS6433030A publication Critical patent/JPS6433030A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)

Abstract

PURPOSE:To obtain the titled glass which consists of SiO2-ZrO2-base two components glass having a specified range of ZrO2 content and is excellent in transmission characteristics of ultraviolet rays and is extremely low in thermal expansion coefficient. CONSTITUTION:A soln. obtained by mixing e.g. commercial zirconium butoxide with methyl orthosilicate in the mixing rate respectively shown in a table 1 is dissolved in ethanol having same volume. The raw material soln. obtained by slowly adding prescribed amount of pure water thereto is heated to obtain gel. Then this gel is dried and thereafter heat-treated at 900-1100 deg.C to obtain the aimed glass. This glass is excellent in transmission characteristics of ultraviolet rays as shown in the table 1 and has thermal expansion coefficient showing extremely low value such as 1/10 or below of silica glass. Further the glass of this invention consists of SiO2-ZrO2-base two components glass and 0.2-10wt.% ZrO2 must be contained therein.
JP18734987A 1987-07-27 1987-07-27 Ultraviolet ray-transmittable low thermal expansion glass Pending JPS6433030A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18734987A JPS6433030A (en) 1987-07-27 1987-07-27 Ultraviolet ray-transmittable low thermal expansion glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18734987A JPS6433030A (en) 1987-07-27 1987-07-27 Ultraviolet ray-transmittable low thermal expansion glass

Publications (1)

Publication Number Publication Date
JPS6433030A true JPS6433030A (en) 1989-02-02

Family

ID=16204438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18734987A Pending JPS6433030A (en) 1987-07-27 1987-07-27 Ultraviolet ray-transmittable low thermal expansion glass

Country Status (1)

Country Link
JP (1) JPS6433030A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012248676A (en) * 2011-05-27 2012-12-13 Nuflare Technology Inc Euv mask and manufacturing method therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012248676A (en) * 2011-05-27 2012-12-13 Nuflare Technology Inc Euv mask and manufacturing method therefor

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