JPS6433837A - Image correcting device for scanning type electron microscope - Google Patents

Image correcting device for scanning type electron microscope

Info

Publication number
JPS6433837A
JPS6433837A JP18753087A JP18753087A JPS6433837A JP S6433837 A JPS6433837 A JP S6433837A JP 18753087 A JP18753087 A JP 18753087A JP 18753087 A JP18753087 A JP 18753087A JP S6433837 A JPS6433837 A JP S6433837A
Authority
JP
Japan
Prior art keywords
oscillation
scanning
line number
addition value
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18753087A
Other languages
Japanese (ja)
Inventor
Akira Kagami
Koichi Honma
Fuminobu Furumura
Hisahiro Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP18753087A priority Critical patent/JPS6433837A/en
Publication of JPS6433837A publication Critical patent/JPS6433837A/en
Pending legal-status Critical Current

Links

Landscapes

  • Controls And Circuits For Display Device (AREA)
  • Image Processing (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)

Abstract

PURPOSE:To form a highly precise image oscillation distortion correcting device capable of estimating the oscillation regardless of the size of the amplitude of the scanning oscillation by utilizing the property not depending on the oscillation amplitude of the two-dimensional alignment of the correlation values as a basis when estimating the scanning oscillation in the scan vertical direction based on the correlation information of an image scanning line piece. CONSTITUTION:Mutual correlation values determined over multiple lines using an image line piece, i.e., two-dimensional alignment data determined by the line number and the distance between lines, are sorted for each line number, individual data are weighted by the function of the distance between lines to determine the addition value, and the scanning oscillation in the scan vertical direction is estimated from the addition value. The data constituting the correlation value pattern are sorted for each line number, the addition value with the plus or minus symbol of the relative line number for individual data reflects the phase of the oscillation. This addition value can also reflect the amplitude information of the oscillation. The oscillation with any magnitude can be thereby estimated and corrected precisely.
JP18753087A 1987-07-29 1987-07-29 Image correcting device for scanning type electron microscope Pending JPS6433837A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18753087A JPS6433837A (en) 1987-07-29 1987-07-29 Image correcting device for scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18753087A JPS6433837A (en) 1987-07-29 1987-07-29 Image correcting device for scanning type electron microscope

Publications (1)

Publication Number Publication Date
JPS6433837A true JPS6433837A (en) 1989-02-03

Family

ID=16207697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18753087A Pending JPS6433837A (en) 1987-07-29 1987-07-29 Image correcting device for scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS6433837A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5879001A (en) * 1995-03-31 1999-03-09 Tapematic U.S.A., Inc. Unit and method for individually feeding brochures to a pick-up station

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5879001A (en) * 1995-03-31 1999-03-09 Tapematic U.S.A., Inc. Unit and method for individually feeding brochures to a pick-up station

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