JPS6434479A - Steam washer - Google Patents

Steam washer

Info

Publication number
JPS6434479A
JPS6434479A JP18771887A JP18771887A JPS6434479A JP S6434479 A JPS6434479 A JP S6434479A JP 18771887 A JP18771887 A JP 18771887A JP 18771887 A JP18771887 A JP 18771887A JP S6434479 A JPS6434479 A JP S6434479A
Authority
JP
Japan
Prior art keywords
washing
tank
tanks
recovering
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18771887A
Other languages
Japanese (ja)
Inventor
Yoshio Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP18771887A priority Critical patent/JPS6434479A/en
Publication of JPS6434479A publication Critical patent/JPS6434479A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To cleanly maintain the washing liquid in washing tanks and to obtain a high washing effect without being affected by the number of washing times by providing the apparatus with a liquid storage tank, a steam washing tank, washing tanks and recovering tanks, filtering and regenerating the washing liquid and circulating the washing liquid between these tanks and between the washing tanks and the recovering tanks. CONSTITUTION: The washing liquid 5 housed in the lower part of the steam washing tank 1 including the washing tanks 2A, 2B is heated and evaporated by a heater 4. The steam 6 in the tank 1 is cooled by a condenser pipe 7 disposed in the upper part of the tank 1. The washing liquid is stored in the liquid storage tank 20 and the washing liquid flowing over from the tank 1 is recovered into the recovering tanks 21A, 21B. Further, the washing liquid in the tank 20 is supplied into the lower part of the tank 1 and to the recovering tanks by the means 25, 26. In addition, the washing liquid in the recovering tanks is supplied to the tank 1 by the means 29 and 31. Drain pipes 23A and 23B connect the tank 1 and the recovering tanks and returning pipes 34A and 34B connect the tank 20 and the recovering tanks in such that when the washing liquid in the recovering tanks exceeds the prescribed amt. this washing liquid is introduced as an excess liquid to the tank 20.
JP18771887A 1987-07-29 1987-07-29 Steam washer Pending JPS6434479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18771887A JPS6434479A (en) 1987-07-29 1987-07-29 Steam washer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18771887A JPS6434479A (en) 1987-07-29 1987-07-29 Steam washer

Publications (1)

Publication Number Publication Date
JPS6434479A true JPS6434479A (en) 1989-02-03

Family

ID=16210958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18771887A Pending JPS6434479A (en) 1987-07-29 1987-07-29 Steam washer

Country Status (1)

Country Link
JP (1) JPS6434479A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003047802A (en) * 2001-08-08 2003-02-18 Shin Ootsuka Kk Water removal device
WO2012053173A1 (en) * 2010-10-21 2012-04-26 ジャパン・フィールド株式会社 Method for steam cleaning object to be steam cleaned
US8850953B2 (en) 2009-01-21 2014-10-07 Robert Bosch Gmbh Axial piston machine having bent axis construction

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003047802A (en) * 2001-08-08 2003-02-18 Shin Ootsuka Kk Water removal device
US8850953B2 (en) 2009-01-21 2014-10-07 Robert Bosch Gmbh Axial piston machine having bent axis construction
WO2012053173A1 (en) * 2010-10-21 2012-04-26 ジャパン・フィールド株式会社 Method for steam cleaning object to be steam cleaned

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