JPS64348B2 - - Google Patents
Info
- Publication number
- JPS64348B2 JPS64348B2 JP58185042A JP18504283A JPS64348B2 JP S64348 B2 JPS64348 B2 JP S64348B2 JP 58185042 A JP58185042 A JP 58185042A JP 18504283 A JP18504283 A JP 18504283A JP S64348 B2 JPS64348 B2 JP S64348B2
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- sensitive
- zirconium oxide
- sensitive material
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 30
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 20
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 20
- 239000011230 binding agent Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 8
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 8
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 239000000654 additive Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000005388 borosilicate glass Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical class [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 claims description 2
- 238000005245 sintering Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 5
- 239000000395 magnesium oxide Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- 241000849798 Nita Species 0.000 description 1
- 241000627951 Osteobrama cotio Species 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- DGXKDBWJDQHNCI-UHFFFAOYSA-N dioxido(oxo)titanium nickel(2+) Chemical compound [Ni++].[O-][Ti]([O-])=O DGXKDBWJDQHNCI-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000002001 electrolyte material Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- -1 tantalate Chemical compound 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Description
産業上の利用分野
本発明は、感湿素材及びそれを用いた感湿素子
に関するものであり、特には電気抵抗値が低く且
つヒステリシス曲線の直線性が良好な感湿素子の
製作を可能ならしめる新規な酸化ジルコニウム基
感湿素材及びそれを用いた薄膜型感湿素子に関す
る。
従来技術
近年、感湿素子が多くの分野で用いられるよう
になつている。感湿素子は、家庭用においては、
電子レンジ等の食品調理制御用、衣類乾燥機の乾
燥度検出用及びVTRのシリンダの結露検出用と
して用いられ、また工業用としては電子部品製造
の際の湿度管理用として広く用いられている。そ
の他、農業用としてハウスの空調用また自動車に
あつてはリアウインド・デ・フオツガの結露防止
に用いる試みが進んでいる。
空調等各種自動化システムにおいては、温度管
理に加えて湿度管理が不可欠となつており、高い
信頼性の下で動作し得る感湿素子の開発が要望さ
れている。
こうした要望に答えるものとして、電気抵抗式
感湿素子が実用化されている。これは、湿度の変
化を電気抵抗の変化として検知するものであり、
使用される感湿素材としては塩化リチウムに代表
される電解質素材系、有機高分子素材系、セラミ
ツク素材系等多数のものが提唱されている。電気
抵抗式感湿素子としては基本的に、電気抵抗値が
低いこと、抵抗−湿度特性の直線性が良いこと、
適正な動作範囲を持つこと、高温に耐えそして使
用環境において劣化しないこと等が要求され、こ
れらを総合的に満足するものとして最近ではセラ
ミツク素材系感湿材料が脚光を浴びつつある状況
にある。
セラミツク系感湿素材としては、酸化ジルコニ
ウム（ZrO2）を主体とし、そこに酸化マグネシ
ウム（MgO）を添加した系が優れたものの一つ
として既に報告されている。そうした事情は例え
ば特開昭58−134401号に記載されている。そこに
記載されるZrO2−MgO系感湿素子は、ZrO2と
MgOの微粉末を所定割合で混合し、加圧後所定
温度で焼結することによつて多孔質の焼結体とな
し、これをスライスしたものに厚膜ペースト印刷
によつて電極を設けたものである。
感湿素子の形態としては、上記のように感湿素
材焼結体をスライスした角片に厚膜ペースト印刷
によつて電極を設けたバルク型と、基板にくし形
に代表される電極を形成し、その上に感湿素材を
塗布し、焼結する薄膜（塗布）型とが知られてい
る。
発明が解決しようとする課題
上記ZrO2−MgO系感湿素子は、酸化ジルコニ
ウム単独の感湿素材を使用するものに比べて性能
の改善を成し遂げたが、斯界では、湿度の変化に
対して一層感度が良く、電気抵抗が低くしかもヒ
ステリシス曲線（湿度−抵抗性能）の直線性が良
好なものが要望されている。
本発明の目的は、酸化ジルコニウムを主体とす
るセラミツク感湿素子において、湿度の変化に対
して一層感度が良く、低電気抵抗性を保持したま
ま特にヒステリシス曲線の直線性が良好な感湿素
子作製のために適した感湿素材を開発し、またそ
れを使用した高性能感湿素子を提供することであ
る。
発明の構成
本発明者等は、酸化ジルコニウムを主体とし、
そこに一定量のチタン酸塩及びタンタル酸塩の一
種以上と酸化チタン及び酸化タンタルの一種以上
とを含む感湿素材が上記目的に適するとの知見を
得た。更に、この感湿素材を使用する感湿素子形
態として、薄膜型の感湿素子が適していることを
見出した。
上記知見に基づいて、本発明は、(1)酸化ジルコ
ニウムを主体とし、添加物としてチタン酸塩及び
タンタル酸塩の一種以上と酸化チタン及び酸化タ
ンタルの一種以上とを酸化ジルコニウムに対して
10〜60重量％の範囲で含有することを特徴とする
感湿素材を提供する。実施態様として感湿素材は
バインダーとして無鉛ホウケイ酸ガラスを含有す
る。更に、本発明は、(2)セラミツク基板と、該基
板上に形成された電極と、該電極上に形成された
感湿部にして、酸化ジルコニウムを主体とし、添
加物としてチタン酸塩及びタンタル酸塩の一種以
上と酸化チタン及び酸化タンタルの一種以上とを
酸化ジルコニウムに対して10〜60重量％の範囲で
含有する感湿素材とバインダーとの混合物の焼結
塗膜から成る感湿部とを備える感湿素子を提供す
る。好ましくは、電極はくし形に形成される。
発明の具体的説明
本発明に用いる酸化ジルコニウム並びにチタン
酸塩及びタンタル酸塩更には酸化チタン及び酸化
タンタルは、高純度のものでありしかも平均粒径
が細かい、例えば0.5μｍ以下の粉末を用いること
が好ましい。チタン酸塩とは、例えばNiTiO3、
CoTiO3等であり、そしてタンタル酸塩とは、例
えばNiTa2O6、CoTa2O6等である。
酸化ジルコニウムは、抵抗値が低く、その点で
は感湿素材として好ましい特性を有するが、反面
湿度の変化に対する電気抵抗値の変化に直線性が
ないという欠点がある。本発明は、酸化ジルコニ
ウムに添加物としてチタン酸塩及びタンタル酸塩
の一種以上と酸化チタン及び酸化タンタルの一種
以上とを添加することにより直線性の改善を得る
ことを基本原理とする。添加物は酸化ジルコニウ
ムに対して10〜60重量％の範囲で添加される。10
重量％未満では添加効果がなく、他方60重量％を
超えて添加すると酸化ジルコニウム本来の特性が
損なわれる。
焼結は比較的低めの温度で実施することが好ま
しく、そのためには焼結助剤としてのバインダー
を使用する必要がある。バインダーとしては無鉛
ホウケイ酸ガラスの使用が好ましいことが見出さ
れた。バインダーとして無鉛ホウケイ酸ガラスは
酸化ジルコニウムと添加物との合計量に対して５
〜15重量％の範囲で添加される。５重量％より少
ないと、焼結温度低減効果が発現しない。他方15
重量％を超えると強度低下その他の弊害が生じ
る。
上記の感湿素材を用いて、本発明においては、
好ましい型式の感湿素子として薄膜型感湿素子が
作製される。その製造例を以下に示す。
セラミツク基板、例えばAl2O3、SiO2、ZrO2製
基板上に第１図に示すようなくし形電極が形成さ
れる。これは、例えばアンダー電極としてのニツ
ケルを蒸着し、次いでその上に防錆用のアツパー
電極としての金を蒸着し、フオトエツチングを行
なうことにより形成される。他の方法として、例
えばルテニウムペーストを用いてのスクリーン印
刷による印刷法あるいは無電解メツキによりくし
形電極が形成される。
感湿素材が、好ましくは無鉛ホウケイ酸ガラス
であるバインダーと混合して、上記電極上に塗布
される。その後、130〜190℃の温度雰囲気中で
0.5〜２時間予備乾燥後、800〜900℃の温度で数
十分の焼結を行なう。以上により感湿素材とバイ
ンダーとの混合物の焼結塗膜から成る感湿部が得
られる。
実施例及び比較例
Al2O3基板上に、アンダー電極としてニツケル
を蒸着後、アツパー電極として金を蒸着し、第１
図に示すようなくし形電極をフオトエツチングに
より形成した。第１図において、１は18mm、２は
９mm、３は６mm、４は0.13mm、５は12mmとして形
成した。
上記くし形電極上に、下記の手順で感湿素材を
塗布した。感湿素材としては、酸化ジルコニウム
に対しチタン酸ニツケルと酸化チタン或いはタン
タル酸コバルトと酸化タンタルとをそれぞれ50重
量％添加し、その合計量に対し10重量％の無鉛ホ
ウケイ酸を混合し、アルミナ製の自動乳鉢で粉砕
しそして混練したものを用いた。
粉砕、混練後ブチルカルビトールおよびエポキ
シ系樹脂塗料で粘度調整し、感湿膜の膜厚が20μ
ｍ前後となるようにスクリーン印刷することによ
り塗布した。
その後、170℃の雰囲気で１時間予備乾燥し、
850±10℃の雰囲気中で30分焼結することにより
感湿素子を得た。
この感湿素子の湿度に対する抵抗値の変化を、
測定周波数1000Hzそして測定電圧1Vとして測定
した結果、次表のような理想値との差が少ない、
即ち直線性の良いしかも全体的抵抗値が低い良好
な結果が得られた。
INDUSTRIAL APPLICATION FIELD The present invention relates to a moisture-sensitive material and a moisture-sensitive element using the same, and in particular makes it possible to manufacture a moisture-sensitive element with a low electrical resistance value and good linearity of a hysteresis curve. This invention relates to a novel zirconium oxide-based moisture-sensitive material and a thin-film moisture-sensitive element using the same. BACKGROUND OF THE INVENTION In recent years, moisture sensitive elements have come to be used in many fields. Moisture sensing elements for home use are
It is used to control food cooking in microwave ovens, etc., to detect dryness in clothes dryers, and to detect condensation in VTR cylinders.In industrial applications, it is widely used for humidity control in the manufacture of electronic parts. In addition, attempts are being made to use it for agricultural purposes, such as for air conditioning in greenhouses, and for preventing dew condensation on the rear windows of automobiles. In various automated systems such as air conditioning, humidity control is essential in addition to temperature control, and there is a demand for the development of moisture-sensitive elements that can operate with high reliability. In order to meet these demands, electrical resistance type moisture sensing elements have been put into practical use. This detects changes in humidity as changes in electrical resistance.
Many moisture-sensitive materials have been proposed to be used, including electrolyte materials such as lithium chloride, organic polymer materials, and ceramic materials. As an electrical resistance type humidity sensing element, the basic requirements are that the electrical resistance value is low, the resistance-humidity characteristic has good linearity,
It is required to have an appropriate operating range, withstand high temperatures, and not deteriorate in the environment in which it is used, and ceramic-based moisture-sensitive materials have recently been in the spotlight as a material that comprehensively satisfies these requirements. As a ceramic moisture-sensitive material, a system mainly composed of zirconium oxide (ZrO 2 ) with magnesium oxide (MgO) added thereto has already been reported as one of the excellent materials. Such circumstances are described, for example, in Japanese Patent Application Laid-Open No. 134401/1983. The ZrO 2 −MgO moisture sensing element described therein is based on ZrO 2 and
A porous sintered body was created by mixing MgO fine powder at a specified ratio, pressurizing it, and then sintering it at a specified temperature, and electrodes were attached to slices of this body by thick film paste printing. It is something. There are two types of moisture-sensitive elements: the bulk type, in which electrodes are printed on a square piece of a sintered moisture-sensitive material sliced with thick film paste, as described above, and the comb-shaped electrodes are formed on a substrate. A thin film (coating) type is known in which a moisture sensitive material is coated on top of the moisture sensitive material and sintered. Problems to be Solved by the Invention Although the above-mentioned ZrO 2 -MgO-based moisture-sensitive element has achieved improved performance compared to those using a moisture-sensitive material made of zirconium oxide alone, in this field, it is difficult to There is a demand for a material with good sensitivity, low electrical resistance, and good linearity of the hysteresis curve (humidity-resistance performance). The purpose of the present invention is to produce a ceramic humidity sensing element mainly composed of zirconium oxide, which is more sensitive to changes in humidity and has particularly good linearity of the hysteresis curve while maintaining low electrical resistance. The purpose of the present invention is to develop a moisture-sensitive material suitable for this purpose, and to provide a high-performance moisture-sensitive element using the material. Structure of the Invention The present inventors have discovered that the present inventors mainly use zirconium oxide,
It has been found that a moisture-sensitive material containing a certain amount of one or more of titanate and tantalate and one or more of titanium oxide and tantalum oxide is suitable for the above purpose. Furthermore, we have found that a thin film type moisture sensitive element is suitable as a moisture sensitive element using this moisture sensitive material. Based on the above findings, the present invention provides (1) zirconium oxide as a main ingredient, and one or more of titanate and tantalate as additives and one or more of titanium oxide and tantalum oxide to zirconium oxide.
Provided is a moisture-sensitive material characterized by containing moisture in a range of 10 to 60% by weight. In an embodiment, the moisture sensitive material contains lead-free borosilicate glass as a binder. Furthermore, the present invention provides (2) a ceramic substrate, an electrode formed on the substrate, and a moisture sensitive part formed on the electrode, which are mainly made of zirconium oxide and contain titanate and tantalum as additives. A moisture sensitive part consisting of a sintered coating film of a mixture of a binder and a moisture sensitive material containing one or more acid salts and one or more titanium oxides and tantalum oxides in a range of 10 to 60% by weight based on zirconium oxide; Provided is a humidity sensing element comprising: Preferably, the electrodes are comb-shaped. Specific Description of the Invention The zirconium oxide, titanate, tantalate, and titanium oxide and tantalum oxide used in the present invention are of high purity and have a fine average particle size, for example, 0.5 μm or less powder. is preferred. Titanates include, for example, NiTiO 3 ,
CoTiO 3 and the like, and tantalates include, for example, NiTa 2 O 6 , CoTa 2 O 6 and the like. Zirconium oxide has a low resistance value, which is a desirable characteristic as a moisture-sensitive material, but on the other hand, it has the disadvantage that the change in electrical resistance value with respect to changes in humidity is not linear. The basic principle of the present invention is to improve linearity by adding one or more of titanate and tantalate and one or more of titanium oxide and tantalum oxide as additives to zirconium oxide. The additive is added in a range of 10 to 60% by weight based on zirconium oxide. Ten
If the amount is less than 60% by weight, there will be no effect, while if it is added in an amount exceeding 60% by weight, the original properties of zirconium oxide will be impaired. Sintering is preferably carried out at relatively low temperatures, which requires the use of a binder as a sintering aid. It has been found preferable to use lead-free borosilicate glass as binder. As a binder, lead-free borosilicate glass is
It is added in a range of ~15% by weight. If it is less than 5% by weight, the effect of reducing the sintering temperature will not be exhibited. the other 15
If it exceeds % by weight, a decrease in strength and other adverse effects will occur. In the present invention, using the above moisture-sensitive material,
A preferred type of moisture sensitive element is a thin film type moisture sensitive element. A manufacturing example thereof is shown below. A comb-shaped electrode as shown in FIG. 1 is formed on a ceramic substrate, such as a substrate made of Al 2 O 3 , SiO 2 or ZrO 2 . This is formed, for example, by depositing nickel as an under electrode, then depositing gold thereon as an upper electrode for rust prevention, and photoetching. Alternatively, the comb-shaped electrodes can be formed by screen printing or electroless plating using ruthenium paste, for example. A moisture sensitive material is mixed with a binder, preferably lead-free borosilicate glass, and applied onto the electrode. After that, in a temperature atmosphere of 130-190℃
After preliminary drying for 0.5 to 2 hours, sintering is performed at a temperature of 800 to 900°C for several minutes. Through the above steps, a moisture-sensitive portion consisting of a sintered coating film of a mixture of a moisture-sensitive material and a binder is obtained. Examples and Comparative Examples After evaporating nickel as an under electrode on an Al 2 O 3 substrate, gold was evaporated as an upper electrode.
A comb-shaped electrode as shown in the figure was formed by photoetching. In FIG. 1, 1 is 18 mm, 2 is 9 mm, 3 is 6 mm, 4 is 0.13 mm, and 5 is 12 mm. A moisture-sensitive material was applied onto the comb-shaped electrodes according to the following procedure. The moisture-sensitive material is made of alumina by adding 50% by weight of nickel titanate and titanium oxide or cobalt tantalate and tantalum oxide to zirconium oxide, and mixing 10% by weight of lead-free borosilicate with respect to the total amount. It was ground and kneaded in an automatic mortar. After crushing and kneading, the viscosity is adjusted with butyl carbitol and epoxy resin paint, and the thickness of the moisture-sensitive film is 20μ.
It was applied by screen printing so that it was approximately 100 m thick. After that, pre-dry for 1 hour in an atmosphere of 170℃,
A moisture-sensitive element was obtained by sintering in an atmosphere of 850±10°C for 30 minutes. The change in resistance value of this humidity sensing element with respect to humidity is
As a result of measurement with a measurement frequency of 1000Hz and a measurement voltage of 1V, there is little difference from the ideal value as shown in the following table.
That is, good results with good linearity and low overall resistance were obtained.
【表】
なお、本発明は、比較例と比較すると判るよう
に、ZrO2の単独のものに比べ抵抗値は高いが、
いずれも直線性のある値を示し、ZrO2の単独の
ものは湿度40％及び湿度60％の点において、理想
値との差が極めて大きく好ましい直線性が得られ
ていない。
発明の効果
酸化ジルコニウムのみの感湿素材に比べ、湿度
変化に対する抵抗値の変化に直線性があり、ヒス
テリシス曲線も同一湿度においてはほぼ同一の値
を示す。本感湿素材を使用しての薄膜型感湿素子
は簡易な処理工程によつて高性能の素子を与え、
より低温で焼結することを可能ならしめる。[Table] As can be seen from the comparison with the comparative example, the resistance value of the present invention is higher than that of ZrO 2 alone, but
All of them show linear values, and the one containing ZrO 2 alone has a very large difference from the ideal value at humidity of 40% and humidity of 60%, and preferred linearity cannot be obtained. Effects of the Invention Compared to a moisture-sensitive material made of only zirconium oxide, the resistance value changes linearly with respect to changes in humidity, and the hysteresis curves also show approximately the same value at the same humidity. Thin-film moisture-sensitive elements using this moisture-sensitive material can provide high-performance elements through simple processing steps.
This makes it possible to sinter at lower temperatures.
第１図は、くし形電極を形成した感湿素子基板
の上面図である。
FIG. 1 is a top view of a moisture-sensitive element substrate on which interdigitated electrodes are formed.
Claims (1)
チタン酸塩及びタンタル酸塩の一種以上と酸化チ
タン及び酸化タンタルの一種以上とを酸化ジルコ
ニウムに対して10〜60重量％の範囲で含有するこ
とを特徴とする感湿素材。 ２ バインダーとして無鉛ホウケイ酸ガラスを含
有する特許請求の範囲第１項記載の感湿素材。 ３ セラミツク基板と、該基板上に形成された電
極と、該電極上に形成された感湿部にして、酸化
ジルコニウムを主体とし、添加物としてチタン酸
塩及びタンタル酸塩の一種以上と酸化チタン及び
酸化タンタルの一種以上とを酸化ジルコニウムに
対して10〜60重量％の範囲で含有する感湿素材と
バインダーとの混合物の焼結塗膜から成る感湿部
とを備える感湿素子。 ４ 電極がくし形に形成される特許請求の範囲第
３項記載の感湿素子。[Claims] 1. Mainly composed of zirconium oxide, with one or more titanates and tantalates as additives, and one or more titanium oxides and tantalum oxides in a range of 10 to 60% by weight based on the zirconium oxide. A moisture-sensitive material characterized by containing 2. The moisture-sensitive material according to claim 1, which contains lead-free borosilicate glass as a binder. 3. A ceramic substrate, an electrode formed on the substrate, and a moisture sensitive part formed on the electrode, which are mainly composed of zirconium oxide and contain one or more of titanate and tantalate as additives and titanium oxide. and a moisture-sensitive element comprising a sintered coating film of a mixture of a moisture-sensitive material and a binder containing at least one kind of tantalum oxide in a range of 10 to 60% by weight based on zirconium oxide. 4. The moisture sensing element according to claim 3, wherein the electrodes are formed in a comb shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58185042A JPS6077169A (en) | 1983-10-05 | 1983-10-05 | Moisture sensitive material and moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58185042A JPS6077169A (en) | 1983-10-05 | 1983-10-05 | Moisture sensitive material and moisture sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6077169A JPS6077169A (en) | 1985-05-01 |
| JPS64348B2 true JPS64348B2 (en) | 1989-01-06 |
Family
ID=16163774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58185042A Granted JPS6077169A (en) | 1983-10-05 | 1983-10-05 | Moisture sensitive material and moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6077169A (en) |
-
1983
- 1983-10-05 JP JP58185042A patent/JPS6077169A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6077169A (en) | 1985-05-01 |
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