JPS6435108A - Drive mechanism - Google Patents

Drive mechanism

Info

Publication number
JPS6435108A
JPS6435108A JP19194987A JP19194987A JPS6435108A JP S6435108 A JPS6435108 A JP S6435108A JP 19194987 A JP19194987 A JP 19194987A JP 19194987 A JP19194987 A JP 19194987A JP S6435108 A JPS6435108 A JP S6435108A
Authority
JP
Japan
Prior art keywords
guide shaft
pair
bearing sections
coupling cylinder
coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19194987A
Other languages
Japanese (ja)
Inventor
Kaname Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP19194987A priority Critical patent/JPS6435108A/en
Publication of JPS6435108A publication Critical patent/JPS6435108A/en
Priority to US07/888,277 priority patent/US5218896A/en
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
  • Bearings For Parts Moving Linearly (AREA)

Abstract

PURPOSE:To simplify an electron beam exposure device by coupling a pair of bearing sections slidable on a guide shaft through a coupling cylinder then leading fluid through the interior of the guide shaft into the coupling cylinder. CONSTITUTION:A pair of bearing sections 20 are arranged slidably on a guide shaft 1 provided with a flange 5. Then the pair of bearing sections 20 are coupled through a coupling cylinder 4 so as to form an air lead-in path 19 in the guide shaft 1. Compressed air is led in through the air lead-in path 19. Since no piping is required, the device can be simplified.
JP19194987A 1986-11-06 1987-07-30 Drive mechanism Pending JPS6435108A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP19194987A JPS6435108A (en) 1987-07-30 1987-07-30 Drive mechanism
US07/888,277 US5218896A (en) 1986-11-06 1992-05-26 Driving mechanism with gas bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19194987A JPS6435108A (en) 1987-07-30 1987-07-30 Drive mechanism

Publications (1)

Publication Number Publication Date
JPS6435108A true JPS6435108A (en) 1989-02-06

Family

ID=16283136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19194987A Pending JPS6435108A (en) 1986-11-06 1987-07-30 Drive mechanism

Country Status (1)

Country Link
JP (1) JPS6435108A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002110523A (en) * 2000-09-29 2002-04-12 Sumitomo Heavy Ind Ltd Exposure equipment
JP2003074512A (en) * 2001-08-30 2003-03-12 Berumateikku Hanbai Kk Linear guide air cylinder
JP2003080475A (en) * 2001-09-07 2003-03-18 Showa Shinku:Kk Manipulator
US7578228B2 (en) 2004-12-22 2009-08-25 Fanuc Ltd Air balance structure
KR100970442B1 (en) * 2008-02-12 2010-07-15 디에스플랜트(주) Filling container up and down device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5070785A (en) * 1973-10-27 1975-06-12
JPS5322963A (en) * 1976-08-12 1978-03-02 Klinger Ag Working cylinder
JPS5614883A (en) * 1979-07-16 1981-02-13 Kawamoto Seisakusho:Kk Controlling method for number of pump to operate
JPS599304A (en) * 1982-07-05 1984-01-18 Toyooki Kogyo Co Ltd Hydraulic cylinder
JPS59164407A (en) * 1983-03-09 1984-09-17 Tourishiya:Kk Cylinder device having vacuum chamber
JPS615002A (en) * 1985-04-22 1986-01-10 Uchida Seiichi Germicide

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5070785A (en) * 1973-10-27 1975-06-12
JPS5322963A (en) * 1976-08-12 1978-03-02 Klinger Ag Working cylinder
JPS5614883A (en) * 1979-07-16 1981-02-13 Kawamoto Seisakusho:Kk Controlling method for number of pump to operate
JPS599304A (en) * 1982-07-05 1984-01-18 Toyooki Kogyo Co Ltd Hydraulic cylinder
JPS59164407A (en) * 1983-03-09 1984-09-17 Tourishiya:Kk Cylinder device having vacuum chamber
JPS615002A (en) * 1985-04-22 1986-01-10 Uchida Seiichi Germicide

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002110523A (en) * 2000-09-29 2002-04-12 Sumitomo Heavy Ind Ltd Exposure equipment
JP2003074512A (en) * 2001-08-30 2003-03-12 Berumateikku Hanbai Kk Linear guide air cylinder
JP2003080475A (en) * 2001-09-07 2003-03-18 Showa Shinku:Kk Manipulator
US7578228B2 (en) 2004-12-22 2009-08-25 Fanuc Ltd Air balance structure
KR100970442B1 (en) * 2008-02-12 2010-07-15 디에스플랜트(주) Filling container up and down device

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