JPS6435228A - Temperature sensor - Google Patents

Temperature sensor

Info

Publication number
JPS6435228A
JPS6435228A JP18898187A JP18898187A JPS6435228A JP S6435228 A JPS6435228 A JP S6435228A JP 18898187 A JP18898187 A JP 18898187A JP 18898187 A JP18898187 A JP 18898187A JP S6435228 A JPS6435228 A JP S6435228A
Authority
JP
Japan
Prior art keywords
support
temperature
thermocouple
quartz
strands
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18898187A
Other languages
Japanese (ja)
Inventor
Hisaharu Obinata
Katsuya Okumura
Toshinobu Araki
Shigeya Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Ulvac Inc
Original Assignee
Toshiba Corp
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Ulvac Inc filed Critical Toshiba Corp
Priority to JP18898187A priority Critical patent/JPS6435228A/en
Publication of JPS6435228A publication Critical patent/JPS6435228A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

PURPOSE:To obtain a temperature sensor with a high measuring accuracy as well as with a quick reaction rate, by connecting strands of a thermocouple securely to a temperature measuring chip with a better heat conductivity as well as very small heat capacity. CONSTITUTION:A temperature measuring chip 1 is held on a quartz support 4. The support 4 is cylindrical, a spherical body 5 is carried on the top thereof to support the temperature measuring chip 1. The support 4 also has two holes 6 to pass strands 2 and 3 of a thermocouple. As the support 4 is made of quartz and less in the mechanical strength, it is protected with a guard 7 made of stainless steel. The support 4 and the guard 7 are mounted integral on a temperature sensor body 9 with a screw 8. Thus, the strands 2 and 3 of the thermocouple are protected in the quartz support 4 as poor heat conductor thereby enabling accurate measurement of temperature without being affected by ambient temperature.
JP18898187A 1987-07-30 1987-07-30 Temperature sensor Pending JPS6435228A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18898187A JPS6435228A (en) 1987-07-30 1987-07-30 Temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18898187A JPS6435228A (en) 1987-07-30 1987-07-30 Temperature sensor

Publications (1)

Publication Number Publication Date
JPS6435228A true JPS6435228A (en) 1989-02-06

Family

ID=16233302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18898187A Pending JPS6435228A (en) 1987-07-30 1987-07-30 Temperature sensor

Country Status (1)

Country Link
JP (1) JPS6435228A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006003798A1 (en) * 2004-07-01 2006-01-12 Ulvac, Inc. Substrate temperature measuring apparatus and processor
JP2008032697A (en) * 2006-07-06 2008-02-14 Komatsu Ltd Temperature sensor, temperature control device, temperature control device, and temperature control method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611143B2 (en) * 1978-10-18 1986-01-14 Sumitomo Electric Industries

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611143B2 (en) * 1978-10-18 1986-01-14 Sumitomo Electric Industries

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006003798A1 (en) * 2004-07-01 2006-01-12 Ulvac, Inc. Substrate temperature measuring apparatus and processor
JPWO2006003798A1 (en) * 2004-07-01 2008-04-17 株式会社アルバック Substrate temperature measuring apparatus and processing apparatus
JP2008032697A (en) * 2006-07-06 2008-02-14 Komatsu Ltd Temperature sensor, temperature control device, temperature control device, and temperature control method
US8191792B2 (en) 2006-07-06 2012-06-05 Komatsu Ltd. Temperature sensor, temperature control device, temperature controller and temperature-control method

Similar Documents

Publication Publication Date Title
JPS57110928A (en) Thermometer
KR860007538A (en) Ultrasonic sensor in contact with high temperature wall and its use
CA2011659A1 (en) Measuring sensor for fluid state determination and method for measurement using such sensor
JPS5639434A (en) Nipple type clinical thermometer
JPS6435228A (en) Temperature sensor
GB855658A (en) Improvements in and relating to the measurement of thermal conductivity
GB1066492A (en) Determination of heats of reaction
JPS53131081A (en) Thermometer
JPS5682436A (en) Differential scanning calorimeter
NO166847C (en) PROCEDURE AND DEVICE FOR CONTROL OF A CASTING STRING COOLING RATE.
Vainshtok Resistance of 15 Kh 2 NMFA Steel to Cracking in the Temperature Interval From-196 to 500 deg C Determined by Results on Test Specimens Cut From a Pressure Vessel Shell
JPS5443796A (en) Enzyme electrode
Taylor Thermal diffusivity of poco graphite and stainless steel srm 735-s
JPS5313489A (en) Colorimetric analysis
JPS5333188A (en) Chemical analytical apparatus
Ulashchik et al. Thermal Conductivity and Integral Hemispherical Radiating Power of a Magnesia-Spinel Ceramic in the High-Temperature Region
JPS57175230A (en) Attachment terminal plate of temperature-sensitive element for compensation of cold contact
JPS5644851A (en) Measurement of glycocylhemoglobin
Abaltusov et al. Determination of the Heat Flux on the Surface of Composite Materials Interacting With the High-Enthalpy Gas Flow
GUPTA et al. The column method of measuring thermal conductivity of gases- Results on carbon monoxide and oxygen in the temperature range 350 deg to 1500 deg K(Column method of measuring thermal conductivity of CO and oxygen in 350-1500 degrees K temperature range, discussing error sources and data reliability)
Nittel Frictional Temperature Measurement by Means of Natural Thermocouples in the Case of Metallic Dry and Mixed Friction
Lowe Calibration and standards for thermocouple thermometry
SU1573993A1 (en) Device measuring low temperatures in cryogenic pipe-line
Fain ESTUARINE IN SITU WATER QUALITY MONITORING
Otter et al. Measurement of Thermal Diffusivity of Liquid Sn by the Flash-Laser Method. Thermal Conductivity of Liquid in the Temperature Range 1000 to 1900 deg C