JPS6435544A - Projection exposing device - Google Patents
Projection exposing deviceInfo
- Publication number
- JPS6435544A JPS6435544A JP19187487A JP19187487A JPS6435544A JP S6435544 A JPS6435544 A JP S6435544A JP 19187487 A JP19187487 A JP 19187487A JP 19187487 A JP19187487 A JP 19187487A JP S6435544 A JPS6435544 A JP S6435544A
- Authority
- JP
- Japan
- Prior art keywords
- original
- center part
- light quantity
- unevenness
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052736 halogen Inorganic materials 0.000 abstract 3
- 150000002367 halogens Chemical class 0.000 abstract 3
Landscapes
- Light Sources And Details Of Projection-Printing Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19187487A JPS6435544A (en) | 1987-07-31 | 1987-07-31 | Projection exposing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19187487A JPS6435544A (en) | 1987-07-31 | 1987-07-31 | Projection exposing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6435544A true JPS6435544A (en) | 1989-02-06 |
Family
ID=16281908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19187487A Pending JPS6435544A (en) | 1987-07-31 | 1987-07-31 | Projection exposing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6435544A (ja) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4423979Y1 (ja) * | 1966-09-27 | 1969-10-09 | ||
| JPS4974932A (ja) * | 1972-10-16 | 1974-07-19 | ||
| JPS50107787A (ja) * | 1974-02-01 | 1975-08-25 |
-
1987
- 1987-07-31 JP JP19187487A patent/JPS6435544A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4423979Y1 (ja) * | 1966-09-27 | 1969-10-09 | ||
| JPS4974932A (ja) * | 1972-10-16 | 1974-07-19 | ||
| JPS50107787A (ja) * | 1974-02-01 | 1975-08-25 |
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