JPS6435748U - - Google Patents
Info
- Publication number
- JPS6435748U JPS6435748U JP13012887U JP13012887U JPS6435748U JP S6435748 U JPS6435748 U JP S6435748U JP 13012887 U JP13012887 U JP 13012887U JP 13012887 U JP13012887 U JP 13012887U JP S6435748 U JPS6435748 U JP S6435748U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- chuck
- supports
- transporting
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13012887U JPS6435748U (2) | 1987-08-28 | 1987-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13012887U JPS6435748U (2) | 1987-08-28 | 1987-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6435748U true JPS6435748U (2) | 1989-03-03 |
Family
ID=31385016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13012887U Pending JPS6435748U (2) | 1987-08-28 | 1987-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6435748U (2) |
-
1987
- 1987-08-28 JP JP13012887U patent/JPS6435748U/ja active Pending
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