JPS643600A - Optical element and microscope using said element - Google Patents

Optical element and microscope using said element

Info

Publication number
JPS643600A
JPS643600A JP15866087A JP15866087A JPS643600A JP S643600 A JPS643600 A JP S643600A JP 15866087 A JP15866087 A JP 15866087A JP 15866087 A JP15866087 A JP 15866087A JP S643600 A JPS643600 A JP S643600A
Authority
JP
Japan
Prior art keywords
sample
soft
laser light
zone plate
fresnel zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15866087A
Other languages
Japanese (ja)
Other versions
JPH0786559B2 (en
Inventor
Masami Kakuchi
Misao Sekimoto
Masami Ando
Hideki Maezawa
Sadao Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP15866087A priority Critical patent/JPH0786559B2/en
Publication of JPS643600A publication Critical patent/JPS643600A/en
Publication of JPH0786559B2 publication Critical patent/JPH0786559B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE:To improve operability by installing a Fresnel zone plate for a short wavelength for the purpose of the electromagnetic wave of the wavelength belonging to a wavelength region consisting of a soft X-ray region and UV region and a Fresnel zone plate for visible light on the same plane. CONSTITUTION:A sample 6 is supported by a moving mechanism 7 and is positioned behind a mirror 4 and an optical element 8 is supported and positioned by a moving mechanism 14. He-Ne laser light 2 is first projected on the sample 6 in a state of the air in a vacuum chamber is not evacuated, i.e., in atm and the magnified image of 5mum is imaged on the Fresnel zone plate 8 by the diffracted light of the He-Ne laser light transmitted through the sample. This image is photographed by a television camera 12 and is observed by a monitor television 13. The magnified images of Al of 5mum and 0.05mum are obtd. on the same imaging plane as the image plane for the He-Ne laser light when the soft X-rays are projected on the sample after the mirror 4 is retreated and the air in a vacuum chamber 15 is evacuated. The need for focusing and aligning of the soft X-rays is thus eliminated by using the optical element which can be aligned in the atm.
JP15866087A 1987-06-25 1987-06-25 Optical element and microscope using the same Expired - Lifetime JPH0786559B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15866087A JPH0786559B2 (en) 1987-06-25 1987-06-25 Optical element and microscope using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15866087A JPH0786559B2 (en) 1987-06-25 1987-06-25 Optical element and microscope using the same

Publications (2)

Publication Number Publication Date
JPS643600A true JPS643600A (en) 1989-01-09
JPH0786559B2 JPH0786559B2 (en) 1995-09-20

Family

ID=15676566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15866087A Expired - Lifetime JPH0786559B2 (en) 1987-06-25 1987-06-25 Optical element and microscope using the same

Country Status (1)

Country Link
JP (1) JPH0786559B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0216498A (en) * 1988-07-04 1990-01-19 Hamamatsu Photonics Kk Radiation image magnifying and observing device
JPH03207000A (en) * 1990-01-10 1991-09-10 Nikon Corp X-ray optical element holding frame
US5434901A (en) * 1992-12-07 1995-07-18 Olympus Optical Co., Ltd. Soft X-ray microscope
KR101031675B1 (en) * 2010-11-23 2011-04-29 전남대학교산학협력단 3D X-ray microscope and X-ray mirror manufacturing method using X-ray mirror

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0216498A (en) * 1988-07-04 1990-01-19 Hamamatsu Photonics Kk Radiation image magnifying and observing device
JPH03207000A (en) * 1990-01-10 1991-09-10 Nikon Corp X-ray optical element holding frame
US5434901A (en) * 1992-12-07 1995-07-18 Olympus Optical Co., Ltd. Soft X-ray microscope
KR101031675B1 (en) * 2010-11-23 2011-04-29 전남대학교산학협력단 3D X-ray microscope and X-ray mirror manufacturing method using X-ray mirror

Also Published As

Publication number Publication date
JPH0786559B2 (en) 1995-09-20

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