JPS6436407A - Cutter for semiconductor single-crystalline bar - Google Patents

Cutter for semiconductor single-crystalline bar

Info

Publication number
JPS6436407A
JPS6436407A JP62192473A JP19247387A JPS6436407A JP S6436407 A JPS6436407 A JP S6436407A JP 62192473 A JP62192473 A JP 62192473A JP 19247387 A JP19247387 A JP 19247387A JP S6436407 A JPS6436407 A JP S6436407A
Authority
JP
Japan
Prior art keywords
blade
distance
distance sensor
sensor
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62192473A
Other languages
Japanese (ja)
Inventor
Yutaka Kubodera
Kazunari Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP62192473A priority Critical patent/JPS6436407A/en
Priority to US07/223,802 priority patent/US4971021A/en
Priority to IT2152288A priority patent/IT1226469B/en
Priority to KR1019880009648A priority patent/KR940011179B1/en
Publication of JPS6436407A publication Critical patent/JPS6436407A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D47/00—Sawing machines or sawing devices working with circular saw blades, characterised only by constructional features of particular parts
    • B23D47/005—Vibration-damping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

PURPOSE:To display a deviation of an inner circumferential blade from a reference position, by detecting a distance between the inner circumferential blade and a distance sensor by the distance sensor facing upon the inner circumferential blade. CONSTITUTION:After a blade 1 has been placed in movement by setting up a single-crystalline bar W at a predetermined cutting position, a control signal of starting of cutting is applied to an input interface 12. On the one hand, a distance sensor 2 detects continuously a distance between the same and a blade 1 facing upon the same and puts out an analog detected signal. The analog signal includes a facial deviation of a blade 1, a warp, a ripple ingredient of a power source noise and a noise. The detected distance between the blade 1 and distance sensor 2 is divided into five stages by a sensor amplifier 3 and sensor position detecting part 4 and decides that in which part of an allowable range of a deviation in five stages a fixed position of a distance sensor 2 which is regarded as a reference position of the blade 1 exists.
JP62192473A 1987-07-31 1987-07-31 Cutter for semiconductor single-crystalline bar Pending JPS6436407A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62192473A JPS6436407A (en) 1987-07-31 1987-07-31 Cutter for semiconductor single-crystalline bar
US07/223,802 US4971021A (en) 1987-07-31 1988-07-25 Apparatus for cutting semiconductor crystal
IT2152288A IT1226469B (en) 1987-07-31 1988-07-27 APPARATUS TO CUT SEMICONDUCTOR CRYSTAL
KR1019880009648A KR940011179B1 (en) 1987-07-31 1988-07-29 Apparatus for cutting semiconductor crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192473A JPS6436407A (en) 1987-07-31 1987-07-31 Cutter for semiconductor single-crystalline bar

Publications (1)

Publication Number Publication Date
JPS6436407A true JPS6436407A (en) 1989-02-07

Family

ID=16291878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192473A Pending JPS6436407A (en) 1987-07-31 1987-07-31 Cutter for semiconductor single-crystalline bar

Country Status (1)

Country Link
JP (1) JPS6436407A (en)

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