JPS6437019A - Plasma processor - Google Patents

Plasma processor

Info

Publication number
JPS6437019A
JPS6437019A JP19395187A JP19395187A JPS6437019A JP S6437019 A JPS6437019 A JP S6437019A JP 19395187 A JP19395187 A JP 19395187A JP 19395187 A JP19395187 A JP 19395187A JP S6437019 A JPS6437019 A JP S6437019A
Authority
JP
Japan
Prior art keywords
phase
output control
inputted
alternate current
processor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19395187A
Other languages
Japanese (ja)
Inventor
Koji Ikegami
Hiroshi Tateishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19395187A priority Critical patent/JPS6437019A/en
Publication of JPS6437019A publication Critical patent/JPS6437019A/en
Pending legal-status Critical Current

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE:To enable the title processor to be constituted at low cost by a method wherein three phase alternate current is inputted; the phase of this three phase alternate current is detected; and on.off of respective phase currents are controlled by output control signals conforming to the detected phase. CONSTITUTION:When star connection three phase alternate current with neutral point thereof grounded is inputted to a turning magnetic field generating power supply 6 from input terminals u, v, w, a phase detection circuit 7 detects the minus side of respective phases to convert it into one shot pulse (a) as a phase signal. The one shot pulse (a) is inputted to an output control circuit 8 to toggle- transmit on.off signals controlling power switching elements 9 so that output control signals b, c may be outputted from the output control circuit 8. Through these procedures, the cost of this processor can be cut down.
JP19395187A 1987-08-03 1987-08-03 Plasma processor Pending JPS6437019A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19395187A JPS6437019A (en) 1987-08-03 1987-08-03 Plasma processor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19395187A JPS6437019A (en) 1987-08-03 1987-08-03 Plasma processor

Publications (1)

Publication Number Publication Date
JPS6437019A true JPS6437019A (en) 1989-02-07

Family

ID=16316471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19395187A Pending JPS6437019A (en) 1987-08-03 1987-08-03 Plasma processor

Country Status (1)

Country Link
JP (1) JPS6437019A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03120258U (en) * 1990-03-22 1991-12-10
JP2008210890A (en) * 2007-02-23 2008-09-11 Nichicon Corp Chip-type electronic components

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03120258U (en) * 1990-03-22 1991-12-10
JP2008210890A (en) * 2007-02-23 2008-09-11 Nichicon Corp Chip-type electronic components

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