JPS6437644U - - Google Patents
Info
- Publication number
- JPS6437644U JPS6437644U JP13128787U JP13128787U JPS6437644U JP S6437644 U JPS6437644 U JP S6437644U JP 13128787 U JP13128787 U JP 13128787U JP 13128787 U JP13128787 U JP 13128787U JP S6437644 U JPS6437644 U JP S6437644U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- dust
- vibration
- amount
- particle counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 claims 2
- 238000005070 sampling Methods 0.000 claims 1
- 230000001629 suppression Effects 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Description
第１図は本考案の一実施例を示す側面図Ａ及び
平面図Ｂ、第２図は本考案の他の実施例を示す側
面図Ａ及び平面図Ｂである。
１０１，２０１……供試バルブ、１０２，２０
２……クリーンエア供給フイルター、１０３，２
０３……フイルター支持台、１０４，２０４……
フイルター高さ調整ネジ、１０５，２０５……バ
ルブ支持台、１０６，２０６……衝撃吸収スプリ
ング、１０７，２０７……電動モーター、１０８
，２０８……スプリング連結振動子、１０９，２
０９……振動吸収プラスチツクチユーブ、１１０
，２１０……パーテイクルカウンター接続チユー
ブ、１１１……バツクアツプ供給フイルター、２
１１……バツクアツプエア供給チユーブ、１１２
，２１２……基板。
FIG. 1 is a side view A and a plan view B showing one embodiment of the present invention, and FIG. 2 is a side view A and a plan view B showing another embodiment of the present invention. 101,201...Test valve, 102,20
2...Clean air supply filter, 103,2
03... Filter support stand, 104, 204...
Filter height adjustment screw, 105,205...Valve support stand, 106,206...Shock absorption spring, 107,207...Electric motor, 108
, 208... Spring-connected vibrator, 109, 2
09... Vibration absorbing plastic tube, 110
, 210... Particle counter connection tube, 111... Backup supply filter, 2
11...Backup air supply tube, 112
, 212...Substrate.
Claims (1)
機構と、振動がバルブ以外のものに伝わらない様
な振動電播抑制構造と、バルブを閉じても、塵埃
量測定のためのパーテイクルカウンターに、別系
統から自動的にサンプリングエアーをバツクアツ
プする機構とを有することを特徴とするバルブ塵
埃量試験装置。 A vibration mechanism that uniformly vibrates the valve, a vibration electromagnetic suppression structure that prevents vibrations from being transmitted to anything other than the valve, and a particle counter that measures the amount of dust even when the valve is closed, has a separate system. A valve dust amount testing device characterized by having a mechanism for automatically backing up sampling air from a valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13128787U JPS6437644U (en) | 1987-08-27 | 1987-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13128787U JPS6437644U (en) | 1987-08-27 | 1987-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437644U true JPS6437644U (en) | 1989-03-07 |
Family
ID=31387210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13128787U Pending JPS6437644U (en) | 1987-08-27 | 1987-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437644U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03103749A (en) * | 1989-09-19 | 1991-04-30 | Tokyo Electron Ltd | Particle measuring instrument |
| JPH03233343A (en) * | 1989-12-04 | 1991-10-17 | Tokyo Electron Ltd | Particle measuring instrument |
-
1987
- 1987-08-27 JP JP13128787U patent/JPS6437644U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03103749A (en) * | 1989-09-19 | 1991-04-30 | Tokyo Electron Ltd | Particle measuring instrument |
| JPH03233343A (en) * | 1989-12-04 | 1991-10-17 | Tokyo Electron Ltd | Particle measuring instrument |
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