JPS64393A - Vacuum pump device - Google Patents

Vacuum pump device

Info

Publication number
JPS64393A
JPS64393A JP15120587A JP15120587A JPS64393A JP S64393 A JPS64393 A JP S64393A JP 15120587 A JP15120587 A JP 15120587A JP 15120587 A JP15120587 A JP 15120587A JP S64393 A JPS64393 A JP S64393A
Authority
JP
Japan
Prior art keywords
rotor
turbo
rotating shaft
vacuum pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15120587A
Other languages
Japanese (ja)
Other versions
JPH076519B2 (en
JPH01393A (en
Inventor
Mitsuo Yoneyama
Osami Matsushita
Michiyuki Takagi
Masahiro Mase
Yoshihisa Kurita
Kazuaki Nakamori
Ichiro Osakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15120587A priority Critical patent/JPH076519B2/en
Publication of JPS64393A publication Critical patent/JPS64393A/en
Publication of JPH01393A publication Critical patent/JPH01393A/en
Publication of JPH076519B2 publication Critical patent/JPH076519B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

PURPOSE: To reduce the installation space and obtain ultra-high-vacuum with cleanses by connecting the rotating shaft of a rotor of a turbo-molecular pump with the rotating shaft of a rotor of a turbo roughing vacuum pump through a magnetic coupling.
CONSTITUTION: Inside a casing 21 having a suction port 22 on one side thereof and a discharge port 23 on the other side thereof, an axial-flow blade 24, centrifugal blade 25 and vortex blade 26 are provided. The rotating shaft of the rotor 27A of a turbo-molecular pump 30 is connected with the rotating shaft of the rotor 27B of a turbo roughing vacuum pump 31 through a magnetic coupling 35. The rotor 27 is supported with a radial magnetic bearing 32 mounted inside the casing 21 and a thrust magnetic bearing 33. Therefore, it is possible to reduce the installation space and obtain the ultra-high-vacuum with cleanses.
COPYRIGHT: (C)1989,JPO&Japio
JP15120587A 1987-06-19 1987-06-19 Vacuum pump device Expired - Lifetime JPH076519B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15120587A JPH076519B2 (en) 1987-06-19 1987-06-19 Vacuum pump device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15120587A JPH076519B2 (en) 1987-06-19 1987-06-19 Vacuum pump device

Publications (3)

Publication Number Publication Date
JPS64393A true JPS64393A (en) 1989-01-05
JPH01393A JPH01393A (en) 1989-01-05
JPH076519B2 JPH076519B2 (en) 1995-01-30

Family

ID=15513535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15120587A Expired - Lifetime JPH076519B2 (en) 1987-06-19 1987-06-19 Vacuum pump device

Country Status (1)

Country Link
JP (1) JPH076519B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2406000A (en) * 2003-08-27 2005-03-16 Freepower Ltd Magnetic coupling for a turbo generator arrangement
DE102008061805A1 (en) * 2008-12-11 2010-06-17 Oerlikon Leybold Vacuum Gmbh Vacuum pump e.g. turbomolecular pump, has rotor shaft part with set of individual shafts connected with each other by coupling device, where individual shafts are coaxially arranged and support pump elements
US8746774B2 (en) 2010-06-28 2014-06-10 Kawasaki Jukogyo Kabushiki Kaisha Motorcycle position lamp arrangement

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2406000A (en) * 2003-08-27 2005-03-16 Freepower Ltd Magnetic coupling for a turbo generator arrangement
GB2406000B (en) * 2003-08-27 2006-12-20 Freepower Ltd Working energy recovery system having rotary magnetic coupling
DE102008061805A1 (en) * 2008-12-11 2010-06-17 Oerlikon Leybold Vacuum Gmbh Vacuum pump e.g. turbomolecular pump, has rotor shaft part with set of individual shafts connected with each other by coupling device, where individual shafts are coaxially arranged and support pump elements
US8746774B2 (en) 2010-06-28 2014-06-10 Kawasaki Jukogyo Kabushiki Kaisha Motorcycle position lamp arrangement

Also Published As

Publication number Publication date
JPH076519B2 (en) 1995-01-30

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