JPS6439722A - Diffusing furnace apparatus - Google Patents

Diffusing furnace apparatus

Info

Publication number
JPS6439722A
JPS6439722A JP19735387A JP19735387A JPS6439722A JP S6439722 A JPS6439722 A JP S6439722A JP 19735387 A JP19735387 A JP 19735387A JP 19735387 A JP19735387 A JP 19735387A JP S6439722 A JPS6439722 A JP S6439722A
Authority
JP
Japan
Prior art keywords
board
furnace apparatus
prevent
disks
carrier unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19735387A
Other languages
Japanese (ja)
Inventor
Katsuyuki Sasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP19735387A priority Critical patent/JPS6439722A/en
Publication of JPS6439722A publication Critical patent/JPS6439722A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent O2 from being absorbed to all semiconductor substrate on a mother board by standing a plurality of quartz disks on the board of a diffusing furnace apparatus. CONSTITUTION:A mother board 1 is made accessible into and from a core tube 3 by drawing rod 2. Semiconductor substrates 4 are stood at a carrier unit on the board 1. One quartz disk 5 is disposed at the end of the side in which the rod 2 is attached, and in order to prevent O2 from being adsorbed at the time of introducing the board 1 into or extracting it from a furnace, a plurality of the disks 6 are mounted at each carrier unit on the board 1.
JP19735387A 1987-08-06 1987-08-06 Diffusing furnace apparatus Pending JPS6439722A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19735387A JPS6439722A (en) 1987-08-06 1987-08-06 Diffusing furnace apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19735387A JPS6439722A (en) 1987-08-06 1987-08-06 Diffusing furnace apparatus

Publications (1)

Publication Number Publication Date
JPS6439722A true JPS6439722A (en) 1989-02-10

Family

ID=16373072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19735387A Pending JPS6439722A (en) 1987-08-06 1987-08-06 Diffusing furnace apparatus

Country Status (1)

Country Link
JP (1) JPS6439722A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5370748A (en) * 1990-04-20 1994-12-06 Nippon Steel Corporation Process for manufacturing double oriented electrical steel sheet having high magnetic flux density

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5370748A (en) * 1990-04-20 1994-12-06 Nippon Steel Corporation Process for manufacturing double oriented electrical steel sheet having high magnetic flux density

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