JPS644219A - Treatment equipment of waste gas for dry etching device - Google Patents
Treatment equipment of waste gas for dry etching deviceInfo
- Publication number
- JPS644219A JPS644219A JP62160616A JP16061687A JPS644219A JP S644219 A JPS644219 A JP S644219A JP 62160616 A JP62160616 A JP 62160616A JP 16061687 A JP16061687 A JP 16061687A JP S644219 A JPS644219 A JP S644219A
- Authority
- JP
- Japan
- Prior art keywords
- waste gas
- treatment cylinder
- dry etching
- etching device
- adsorbent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002912 waste gas Substances 0.000 title abstract 7
- 238000001312 dry etching Methods 0.000 title abstract 3
- 239000000779 smoke Substances 0.000 abstract 6
- 239000007789 gas Substances 0.000 abstract 5
- 239000003463 adsorbent Substances 0.000 abstract 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- 229910015844 BCl3 Inorganic materials 0.000 abstract 1
- 239000012295 chemical reaction liquid Substances 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Treating Waste Gases (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To facilitate detection of reactive gas which is not adsorbed to an adsorbent of a waste gas treatment cylinder and is discharged by providing both a reaction tank in which the waste gas sent from the waste gas treatment cylinder is allowed to react with water and a smoke sensor for detecting white smoke. CONSTITUTION:A treatment equipment of waste gas which consists of a waste gas treatment cylinder 7, a reaction tank 9 and a smoke sensor 12 is connected with a rotary pump 6 of a dry etching device used for production of a semiconductor device. The waste gas sent from the dry etching device is introduced into the treatment cylinder 7 and reactive gas or the like is adsorbed and removed with an adsorbent 18 packed to the inside of the treatment cylinder 7 and thereafter discarded to an exhaust duct. The reactive gas is sucked with a suction pump 10 through a gas suction pipe 13 buried in the upper part of the treatment cylinder 7 and bubbled in reaction liquid 14 of the reaction tank 9. Since the reactive gas such as BCl3 is allowed to react with water and white smoke is generated, a smoke sensor 12 is actuated in case white smoke is generated and a patrol lamp 8 is turned on a light and the break-through of the adsorbent 18 is automatically detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62160616A JPS644219A (en) | 1987-06-26 | 1987-06-26 | Treatment equipment of waste gas for dry etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62160616A JPS644219A (en) | 1987-06-26 | 1987-06-26 | Treatment equipment of waste gas for dry etching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS644219A true JPS644219A (en) | 1989-01-09 |
Family
ID=15718783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62160616A Pending JPS644219A (en) | 1987-06-26 | 1987-06-26 | Treatment equipment of waste gas for dry etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS644219A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106861360A (en) * | 2017-03-02 | 2017-06-20 | 合肥杰通环境技术有限公司 | A kind of cleaning treatment system of smoking room |
-
1987
- 1987-06-26 JP JP62160616A patent/JPS644219A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106861360A (en) * | 2017-03-02 | 2017-06-20 | 合肥杰通环境技术有限公司 | A kind of cleaning treatment system of smoking room |
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