JPS6444011A - Organic metal vapor growth apparatus - Google Patents

Organic metal vapor growth apparatus

Info

Publication number
JPS6444011A
JPS6444011A JP20050587A JP20050587A JPS6444011A JP S6444011 A JPS6444011 A JP S6444011A JP 20050587 A JP20050587 A JP 20050587A JP 20050587 A JP20050587 A JP 20050587A JP S6444011 A JPS6444011 A JP S6444011A
Authority
JP
Japan
Prior art keywords
sound
pressure
vessel
flow rate
differential pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20050587A
Other languages
Japanese (ja)
Other versions
JP2576140B2 (en
Inventor
Setsushiyuu Kahara
Tomiichi Watanabe
Koji Tamamura
Fumihiko Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP20050587A priority Critical patent/JP2576140B2/en
Publication of JPS6444011A publication Critical patent/JPS6444011A/en
Application granted granted Critical
Publication of JP2576140B2 publication Critical patent/JP2576140B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To obtain an organic metal vapor growth (MOCVD) apparatus in which the states of pressure, differential pressure, flow rate, etc., in a material gas pipe can be easily and accurately monitored by disposing means for detecting a bubbling sound as a sound or vibration in a bubbler vessel. CONSTITUTION:Means for detecting a bubbling sound in a bubbler vessel 2 containing liquid material 3, such as a stethoscope body 11 is secured in contact with the upper face of flat face of the vessel 2, and a capacitor microphone 12 is connected to an exit of a vinyl tube attached to the body 11. The output of the microphone 12 is supplied through an amplifier 14 to a monitor 13 at an operation place of a MOCVD apparatus. With the construction, since the bubbling sound in the vessel 1 is collected directly as a sound through the body 11, the states of material gas flowing in a pipe, such as pressure, differential pressure, flow rate, etc., can be easily monitored. Thus, the flow rate, pressure, differential pressure can be accurately and easily monitored. As a result, the composition of a crystal can be preferably controlled.
JP20050587A 1987-08-11 1987-08-11 Metal organic chemical vapor deposition equipment Expired - Fee Related JP2576140B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20050587A JP2576140B2 (en) 1987-08-11 1987-08-11 Metal organic chemical vapor deposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20050587A JP2576140B2 (en) 1987-08-11 1987-08-11 Metal organic chemical vapor deposition equipment

Publications (2)

Publication Number Publication Date
JPS6444011A true JPS6444011A (en) 1989-02-16
JP2576140B2 JP2576140B2 (en) 1997-01-29

Family

ID=16425429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20050587A Expired - Fee Related JP2576140B2 (en) 1987-08-11 1987-08-11 Metal organic chemical vapor deposition equipment

Country Status (1)

Country Link
JP (1) JP2576140B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621716U (en) * 1992-06-30 1994-03-22 ティアック株式会社 Air purifier
WO2014007849A1 (en) * 2012-07-02 2014-01-09 James Walker Ventilated structural panels and method of construction with ventilated structural panels

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621716U (en) * 1992-06-30 1994-03-22 ティアック株式会社 Air purifier
WO2014007849A1 (en) * 2012-07-02 2014-01-09 James Walker Ventilated structural panels and method of construction with ventilated structural panels

Also Published As

Publication number Publication date
JP2576140B2 (en) 1997-01-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees