JPS6444632U - - Google Patents
Info
- Publication number
- JPS6444632U JPS6444632U JP13843887U JP13843887U JPS6444632U JP S6444632 U JPS6444632 U JP S6444632U JP 13843887 U JP13843887 U JP 13843887U JP 13843887 U JP13843887 U JP 13843887U JP S6444632 U JPS6444632 U JP S6444632U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- liquid processing
- processing semiconductor
- bubbles
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000003756 stirring Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
Description
第１図は本考案の第１の実施例を示す構成図、
第２図は本考案の第２の実施例を示す構成図であ
る。 １……処理液、２……処理槽、３……パイプ、
４……気泡吹出口、５……気泡、６……回転翼、
７……回転軸。
第２図は本考案の第２の実施例を示す構成図であ
る。 １……処理液、２……処理槽、３……パイプ、
４……気泡吹出口、５……気泡、６……回転翼、
７……回転軸。
Claims (1)
- 半導体ウエーハの液体処理を行う槽の底部から
気泡を発生させる気泡発生機構と、その気泡によ
り駆動される撹拌用回転翼とを有することを特徴
とする半導体ウエーハの液体処理治具。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13843887U JPS6444632U (ja) | 1987-09-10 | 1987-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13843887U JPS6444632U (ja) | 1987-09-10 | 1987-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6444632U true JPS6444632U (ja) | 1989-03-16 |
Family
ID=31400775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13843887U Pending JPS6444632U (ja) | 1987-09-10 | 1987-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6444632U (ja) |
-
1987
- 1987-09-10 JP JP13843887U patent/JPS6444632U/ja active Pending
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