JPS6445172U - - Google Patents
Info
- Publication number
- JPS6445172U JPS6445172U JP13480687U JP13480687U JPS6445172U JP S6445172 U JPS6445172 U JP S6445172U JP 13480687 U JP13480687 U JP 13480687U JP 13480687 U JP13480687 U JP 13480687U JP S6445172 U JPS6445172 U JP S6445172U
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- center
- radial direction
- outer bottom
- umbrella
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の実施例になる黒鉛るつぼでａ
は平面図、ｂは正面断面図、第２図は第１図の黒
鉛るつぼを使用したときの作用を説明する断面図
、第３図は従来の黒鉛るつぼの断面図である。 符号の説明、１……黒鉛るつぼ、２……分割部
、３……傾斜部、４……ＳｉＣ層、５……外側底
面、６……内側底面、７……開口部。
は平面図、ｂは正面断面図、第２図は第１図の黒
鉛るつぼを使用したときの作用を説明する断面図
、第３図は従来の黒鉛るつぼの断面図である。 符号の説明、１……黒鉛るつぼ、２……分割部
、３……傾斜部、４……ＳｉＣ層、５……外側底
面、６……内側底面、７……開口部。
Claims (1)
- 中心を通つて径方向に複数に分割した黒鉛るつ
ぼの外側底面に、中心から径方向に下降する傘状
の傾斜部を設けてなる単結晶引上げ用黒鉛るつぼ
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13480687U JPS6445172U (ja) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13480687U JPS6445172U (ja) | 1987-09-03 | 1987-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445172U true JPS6445172U (ja) | 1989-03-17 |
Family
ID=31393883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13480687U Pending JPS6445172U (ja) | 1987-09-03 | 1987-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445172U (ja) |
-
1987
- 1987-09-03 JP JP13480687U patent/JPS6445172U/ja active Pending