JPS644560Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a setting jig for loading into a cassette a material to be drawn, such as mask glass, to be drawn by an electron beam.

[Prior art]

Conventionally, when loading the above-mentioned drawing material into a cassette, the drawing material was slid along a guide surface from an entrance provided on the side of the cassette. However, this sliding method has the drawback that a lot of dust is generated due to friction, and the dust can cause defects in masks and the like used for submicron-order electron beam lithography.
In order to suppress the generation of this dust, guide rollers can be installed in the cassettes to reduce the friction against the drawing material, but in this case, it is necessary to attach multiple guide rollers to each cassette, and the cassette structure It becomes complicated, making it difficult to obtain high precision, and it also becomes expensive.In particular, this cassette requires several dozen pieces for one electron beam lithography system, which has a large impact on cost. be.

[Purpose of invention]

The present invention solves the above-mentioned drawbacks and problems, and makes it possible to smoothly load materials to be drawn into cassettes using guide rollers, without requiring a plurality of cassettes and increasing the cost, thereby suppressing the generation of dust. To provide a jig for setting a material to be drawn which can be set.

[Structure of the idea]

To achieve this purpose, the present invention provides a plurality of guide rollers on the cassette mounting table.
When the cassette is set on the mounting table, some of the plurality of guide rollers enter the space inside the cassette, and the drawing material placed on the guide roller located outside the cassette can be smoothly guided into the cassette. This is how it was done.

〔Example〕

The following Figures 1 to 6 show an embodiment of the present invention.
The diagram will be explained. 1 and 2 show a setting jig 1 according to the present invention, on which a plurality of protrusions 3 are arranged in two rows in the left and right direction in FIG. A guide roller 5 for receiving the lower surface of the drawing material 4 (see FIGS. 5 and 6), which will be described later, is rotatably attached to the side where the drawing material 4 is drawn. Face each other with a gap (see Figure 5)
Guide rollers 6 are each rotatably attached.

The mounting table 2 is provided with a positioning protrusion 8 for placing the cassette 7 shown in FIGS. 3 and 4 at a predetermined position on the mounting table 2. As shown in FIG. Further, a stopper 9 is attached to the left end of the mounting table 2 in FIGS. 1 and 2.

Guide rollers 5 and 6 attached to the protrusion 3
Of these, the three pairs of guide rollers 5 and 6 on the right in the upper and lower two rows (six pairs in total) in FIG.
When the cassette 7 shown in FIG.
Positional relationship that allows the user to penetrate inside (Figures 5 and 6)
(see figure).

The upper surface of the main body 11 of the cassette 7 (the upper surface in FIG. 4) is provided with a recess for receiving the drawing material 4 shown by the dashed line in FIG. Place 14 is established,
Entrance/exit 15 provided on the left in Figures 3 and 4
The material 4 to be drawn is moved in and out of the recess 14 from the recess 14.

Of the guide rollers 5 and 6 provided on the mounting table 2, the 6 on the left in FIG.
As shown in FIG. 5, the set is located to the left of the entrance/exit 15 for the set cassette 7 in the same figure.

On the upper surface of the main body 11 of the cassette 7, there are provided a plurality of reference pieces 16 in the vertical direction (vertical direction in FIG. 4, referred to as the Z direction), and reference pieces 16 in the X and Y directions (not shown in FIG. 3) are provided. The material to be drawn 4, which has been positioned by the reference members in the vertical and horizontal directions, is pressed against the lower surface of the reference piece 16 by the presser plate 12, thereby moving the material to be drawn 4 into the cassette main body 1.
The structure is the same as the conventional one except for the through hole 10, and the material 4 to be drawn is clamped and unclamped. The vertical movement mechanism of the presser plate 12, etc. for this purpose are omitted from illustration.

As shown in FIG. 5, the through holes 10 are provided at positions corresponding to both lateral ends of the drawing material 4 inserted into the cassette 7, and the guide rollers 5 inserted into the through holes 10 ,6 is the entrance/exit 15
The drawing material 4 sent from the reference piece 1
6 and the holding plate 12 and is guided into the recess 14. Note that the through hole 10 is a hole when viewed as a cassette 7 made up of a cassette body 11, a holding plate 12, etc.
This also includes cases where one component is only a notch, such as the holding plate 12, for example.

Next, the cassette 7 is set using the setting jig 1 described above.
The loading of the drawing material 4 into the drawing material 4 will be explained. As shown in FIGS. 5 and 6, the position of the cassette 7 is determined by the positioning protrusion 8 of the setting jig 1, and the cassette 7 is set on the mounting table 2. At this time, of the guide rollers 5 and 6 on the mounting table 2, the 6 on the right in FIG.
As shown in the figure, the set includes through holes 10 of the cassette 7.
and are placed in a predetermined positional relationship with respect to the recesses 14 of the cassette 7. Next, the presser plate 12 is pressed against the spring 13 using a push-down handle (not shown).
6 (the same applies to FIG. 4), and place it on the guide roller 5 located on the left side in FIGS. 5 and 6 of the entrance 15 of the recess 14.
When the material 4 to be drawn is placed and pushed to the right while being guided by the guide roller 6, the material 4 to be drawn is located within the guide rollers 5, 6 and the through hole 10 of the cassette 7. The rotation of the guide rollers 5, 6 guides the material into the recess 14 without any sliding friction.

The drawing material 4 inserted into the recess 14 is positioned by reference members in the X and Y directions (not shown), and is then held down by the spring 13 by returning the push-down handle (not shown) to its original position. The pressing force of the plate 12 presses and fixes the reference piece 16 against the lower surface thereof.

The cassette 7 loaded with the material 4 to be drawn in this way is removed from the setting jig 1 and sent to the electron beam drawing device, but the material 4 to be drawn is moved between the guide rollers 5,
6, there is no problem at all because it is held and fixed in a predetermined position by the reference member in the X, Y, and Z directions, the reference piece 16, and the presser plate 12.
Even if the guide rollers 5 and 6 are made of a magnetic material, they are not present in the cassette 7 during drawing, so there is an advantage that they do not adversely affect the electron beam.

The above-mentioned embodiment shows an example in which the guide roller 5 receives the lower surface of the drawing material 4, and the guide roller 6 guides both lateral ends of the drawing material 4 with respect to the insertion direction. However, it is also possible to simply receive only the lower surface of the drawing material 4. In addition, the cassette 7 to be used can be made by appropriately determining the shapes of the cassette body 11 and the holding plate 12.
A space for receiving the guide rollers 5, 6, etc. may be formed without making any special holes.

[Effect of idea]

As described above, according to the present invention, it is not necessary to provide a guide roller on the cassette itself, so the number of parts of the cassette does not increase, and it is only necessary to provide a space such as a hole. It is possible to make a cassette with higher precision without increasing the cost of a cassette that requires processing, and without increasing machining errors or distortions due to machining.
It is possible to perform loading with less dust generation.
Note that the setting jig according to the present invention usually requires only one set, does not require much precision, and does not require consideration of the effect on the electron beam, so it can be made of commonly used materials and is relatively simple and inexpensive. .

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the drawing material setting jig according to the present invention, and FIG. 2 is the same as that shown in FIG.
3 is a schematic plan view showing an example of a cassette used in combination with the setting jig according to the present invention, FIG. 4 is a sectional view taken along the - line in FIG. 3, and FIG.
The figure is a plan view showing a state in which a material to be drawn is loaded by the setting jig of the present invention, and FIG. 6 is a cross-sectional view taken along the line -- in FIG. 1... Setting jig, 2... Placement table, 3... Protrusion, 4... Drawing material, 5, 6... Guide roller,
7...Cassette, 8...Positioning protrusion, 9...
Stopper, 10...Through hole (space), 11...Cassette body, 12...Press plate, 13...Spring, 1
4... recess, 15... doorway, 16... reference piece.

Claims (1)

[Scope of utility model registration request] A setting jig for loading a material to be drawn, such as a mask glass, into a cassette for an electron beam lithography apparatus in which the material to be drawn is loaded by inserting the material from the side, and a mounting table for positioning and supporting the cassette. and a plurality of guide rollers provided on the mounting table along the direction in which the drawing material is inserted into the cassette, and some of the plurality of guide rollers cover the space of the cassette set on the mounting table. The remaining guide roller is positioned in front of the entrance for the material to be drawn in the cassette, and the material to be drawn placed on the guide roller located in front of this is guided to a predetermined position in the cassette. A drawing material setting jig characterized by: