JPS6446221A - Magnetic disk - Google Patents

Magnetic disk

Info

Publication number
JPS6446221A
JPS6446221A JP20176587A JP20176587A JPS6446221A JP S6446221 A JPS6446221 A JP S6446221A JP 20176587 A JP20176587 A JP 20176587A JP 20176587 A JP20176587 A JP 20176587A JP S6446221 A JPS6446221 A JP S6446221A
Authority
JP
Japan
Prior art keywords
single crystal
crystal graphite
target
floatability
stable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20176587A
Other languages
Japanese (ja)
Other versions
JPH0682462B2 (en
Inventor
Yoshinori Honda
Yuichi Kokado
Makoto Kito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62201765A priority Critical patent/JPH0682462B2/en
Publication of JPS6446221A publication Critical patent/JPS6446221A/en
Publication of JPH0682462B2 publication Critical patent/JPH0682462B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To realize the low floating and stable floatability of a head by using single crystal graphite as a target material to be used for formation of a sputtered carbon film. CONSTITUTION:After an underlying film 10 is formed on an aluminum substrate 9, a magnetic layer 11 is formed thereon and a protective layer 12 consisting of the carbon film formed by sputtering of the single crystal graphite used as a target is provided thereon. Namely, the single crystal graphite having high electrical stability and thermal stability is used as the target. The problems such as the defect of the single crystal graphite, generation and adhesion of dust and generation of pinholes therein are thereby solved and the low floating and stable floatability of the head are assured.
JP62201765A 1987-08-14 1987-08-14 Magnetic disk manufacturing method Expired - Lifetime JPH0682462B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62201765A JPH0682462B2 (en) 1987-08-14 1987-08-14 Magnetic disk manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62201765A JPH0682462B2 (en) 1987-08-14 1987-08-14 Magnetic disk manufacturing method

Publications (2)

Publication Number Publication Date
JPS6446221A true JPS6446221A (en) 1989-02-20
JPH0682462B2 JPH0682462B2 (en) 1994-10-19

Family

ID=16446566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62201765A Expired - Lifetime JPH0682462B2 (en) 1987-08-14 1987-08-14 Magnetic disk manufacturing method

Country Status (1)

Country Link
JP (1) JPH0682462B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6468617B1 (en) 1993-07-20 2002-10-22 Semiconductor Energy Laboratory Co., Ltd. Apparatus for fabricating coating and method of fabricating the coating
US6835523B1 (en) 1993-05-09 2004-12-28 Semiconductor Energy Laboratory Co., Ltd. Apparatus for fabricating coating and method of fabricating the coating
WO2010001709A1 (en) * 2008-07-04 2010-01-07 昭和電工株式会社 Seed crystal for growth of silicon carbide single crystal, process for producing the same, and silicone carbide single crystal and process for producing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236731A (en) * 1985-08-09 1987-02-17 Fuji Electric Co Ltd Productioni of magnetic recording medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236731A (en) * 1985-08-09 1987-02-17 Fuji Electric Co Ltd Productioni of magnetic recording medium

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6835523B1 (en) 1993-05-09 2004-12-28 Semiconductor Energy Laboratory Co., Ltd. Apparatus for fabricating coating and method of fabricating the coating
US6468617B1 (en) 1993-07-20 2002-10-22 Semiconductor Energy Laboratory Co., Ltd. Apparatus for fabricating coating and method of fabricating the coating
WO2010001709A1 (en) * 2008-07-04 2010-01-07 昭和電工株式会社 Seed crystal for growth of silicon carbide single crystal, process for producing the same, and silicone carbide single crystal and process for producing the same
JP2010013330A (en) * 2008-07-04 2010-01-21 Showa Denko Kk Seed crystal for growth of silicon carbide single crystal, method for producing the same, silicon carbide single crystal, and method for producing the same

Also Published As

Publication number Publication date
JPH0682462B2 (en) 1994-10-19

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