JPS6446784U - - Google Patents
Info
- Publication number
- JPS6446784U JPS6446784U JP14201187U JP14201187U JPS6446784U JP S6446784 U JPS6446784 U JP S6446784U JP 14201187 U JP14201187 U JP 14201187U JP 14201187 U JP14201187 U JP 14201187U JP S6446784 U JPS6446784 U JP S6446784U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- photodetector
- scanning
- layers
- detect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
図面は本考案の一実施例を示すものであり、第
１図ａは本実施例の概要を説明する正面図、第１
図ｂは側面図、第２図ａは光検知体部分を示す正
面図、第２図ｂは光検知体部分を示す側面図、第
２図ｃは受光面の状態を示す正面図、第３図ａは
基板上の物体への光ビーム照射状態を示す側面図
、第３図ｂは基板上の物体への光ビーム照射状態
を示す正面図、第４図は物体により形成される影
の状態を示す平面図である。
２……光ビーム、３……偏向装置、６……基板
、９……物体、１０……反射ビーム、１１……光
検知体、１２ａ……受光面、ａ……走査方向、Ｓ
１，Ｓ２，Ｓ３，Ｓ４……受光面の走査方向に対
して直交する方向の層。
The drawings show one embodiment of the present invention, and FIG.
Figure b is a side view, Figure 2a is a front view showing the photodetector part, Figure 2b is a side view showing the photodetector part, Figure 2c is a front view showing the state of the light receiving surface, and Figure 2c is a front view showing the state of the light receiving surface. Figure a is a side view showing the state of light beam irradiation on an object on the substrate, Figure 3 b is a front view showing the state of light beam irradiation on the object on the board, and Figure 4 shows the state of the shadow formed by the object. FIG. 2...Light beam, 3...Deflection device, 6...Substrate, 9...Object, 10...Reflected beam, 11...Photodetector, 12a...Light receiving surface, a...Scanning direction, S
1 , S2 , S3 , S4 ...Layers in the direction perpendicular to the scanning direction of the light receiving surface.
Claims (1)
めの偏向装置を有し、基板上を走査した後の反射
ビームを受光する受光面を、走査方向に対して平
行な方向に延出し、かつ走査方向と直交する方向
に複数の層となるように設け、この複数の層に各
各光検知体を設け、前記基板上に載置された物体
と基板との高さの差により生じる光検知体の受光
量の差により所定位置に対する物体の存否を検出
し、また各光検知体の受光量に基づいて物体の高
さを検出するように構成したことを特徴とする光
学的位置検出装置。 It has a deflection device for scanning the light beam on the substrate from an oblique direction, and a light receiving surface that receives the reflected beam after scanning the substrate extends in a direction parallel to the scanning direction, and A plurality of layers are provided in a direction orthogonal to the substrate, and each photodetector is provided on each of the layers, and the photodetector generated due to the difference in height between an object placed on the substrate and the substrate is detected. 1. An optical position detection device characterized by being configured to detect the presence or absence of an object at a predetermined position based on a difference in the amount of light received, and to detect the height of the object based on the amount of light received by each photodetector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14201187U JPS6446784U (en) | 1987-09-17 | 1987-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14201187U JPS6446784U (en) | 1987-09-17 | 1987-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6446784U true JPS6446784U (en) | 1989-03-22 |
Family
ID=31407584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14201187U Pending JPS6446784U (en) | 1987-09-17 | 1987-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6446784U (en) |
-
1987
- 1987-09-17 JP JP14201187U patent/JPS6446784U/ja active Pending
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