JPS6447036U - - Google Patents
Info
- Publication number
- JPS6447036U JPS6447036U JP1987140697U JP14069787U JPS6447036U JP S6447036 U JPS6447036 U JP S6447036U JP 1987140697 U JP1987140697 U JP 1987140697U JP 14069787 U JP14069787 U JP 14069787U JP S6447036 U JPS6447036 U JP S6447036U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust chamber
- process tube
- gas
- reaction
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は一実施例を示す概略断面図、第２図は
従来の熱酸化装置を示す概略断面図である。
１……プロセスチユーブ、２……ウエハ、３…
…ボート、４……反応ガス供給系、５……排気室
、６……排気口、７……蓋、８……ガス導入口。
FIG. 1 is a schematic sectional view showing one embodiment, and FIG. 2 is a schematic sectional view showing a conventional thermal oxidation device. 1...process tube, 2...wafer, 3...
...Boat, 4...Reaction gas supply system, 5...Exhaust chamber, 6...Exhaust port, 7...Lid, 8...Gas inlet.
Claims (1)
ガスが流されるプロセスチユーブの出口に排気室
を備え、この排気室は排気口を備えて負圧にされ
るとともに、ウエハの交換を行なうために開閉可
能になつている熱処理装置において、前記排気室
にガス導入口を設け、このガス導入口から前記プ
ロセスチユーブ内の反応に不活性なガスを供給す
るようにしたことを特徴とする熱処理装置。 An exhaust chamber is provided at the exit of the process tube that accommodates wafers to be heat-treated and into which a reaction gas is flowed. A heat treatment apparatus that can be opened and closed, characterized in that the exhaust chamber is provided with a gas inlet, and an inert gas is supplied to the reaction in the process tube from the gas inlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987140697U JPS6447036U (en) | 1987-09-14 | 1987-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987140697U JPS6447036U (en) | 1987-09-14 | 1987-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447036U true JPS6447036U (en) | 1989-03-23 |
Family
ID=31405105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987140697U Pending JPS6447036U (en) | 1987-09-14 | 1987-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447036U (en) |
-
1987
- 1987-09-14 JP JP1987140697U patent/JPS6447036U/ja active Pending