JPS6448031U - - Google Patents
Info
- Publication number
- JPS6448031U JPS6448031U JP14311587U JP14311587U JPS6448031U JP S6448031 U JPS6448031 U JP S6448031U JP 14311587 U JP14311587 U JP 14311587U JP 14311587 U JP14311587 U JP 14311587U JP S6448031 U JPS6448031 U JP S6448031U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- support member
- switch
- elevating
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 claims description 3
- 230000004913 activation Effects 0.000 claims description 2
- 238000012806 monitoring device Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Landscapes
- Control Of Conveyors (AREA)
Description
図面は本考案における一実施例を示したもので
、第１図は搬送装置の一部切欠き正面図、第２図
はボート位置監視装置の一部切欠き拡大断面図で
ある。
１……搬送台、４……受け台、５……監視機構
、６……支持部材、７……昇降部材、１１……ば
ね、１２……マグネツト（スイツチ起動部材）、
１３……リードスイツチ、１４……ウエハ、Ｂ…
…ボート。
The drawings show one embodiment of the present invention; FIG. 1 is a partially cutaway front view of a conveyance device, and FIG. 2 is a partially cutaway enlarged sectional view of a boat position monitoring device. DESCRIPTION OF SYMBOLS 1... Transport platform, 4... Rest, 5... Monitoring mechanism, 6... Support member, 7... Elevating member, 11... Spring, 12... Magnet (switch activation member),
13...Reed switch, 14...Wafer, B...
…boat.
Claims (1)
に支持部材を取付け、この支持部材に上方に付勢
させた昇降部材を昇降自在に設け、この昇降部材
の上端を前記ボートの下面に当接可能に配置し、
前記支持部材と昇降部材には、前記ボートの下面
の位置状況を検知するスイツチとスイツチ起動部
材を対向配設したことを特徴とする半導体ウエハ
保持ボート位置監視装置。 A support member is attached to a pedestal on which a boat holding semiconductor wafers is placed, and an elevating member biased upward is provided on the support member so as to be movable up and down, and the upper end of this elevating member is arranged so as to be able to come into contact with the lower surface of the boat. death,
A semiconductor wafer holding boat position monitoring device characterized in that a switch for detecting the positional condition of the lower surface of the boat and a switch activation member are disposed opposite to each other on the support member and the lifting member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143115U JPH0632683Y2 (en) | 1987-09-21 | 1987-09-21 | Semiconductor wafer holding boat position monitoring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143115U JPH0632683Y2 (en) | 1987-09-21 | 1987-09-21 | Semiconductor wafer holding boat position monitoring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6448031U true JPS6448031U (en) | 1989-03-24 |
| JPH0632683Y2 JPH0632683Y2 (en) | 1994-08-24 |
Family
ID=31409648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987143115U Expired - Lifetime JPH0632683Y2 (en) | 1987-09-21 | 1987-09-21 | Semiconductor wafer holding boat position monitoring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632683Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56173524U (en) * | 1980-05-23 | 1981-12-22 | ||
| JPS6168444U (en) * | 1984-10-12 | 1986-05-10 |
-
1987
- 1987-09-21 JP JP1987143115U patent/JPH0632683Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56173524U (en) * | 1980-05-23 | 1981-12-22 | ||
| JPS6168444U (en) * | 1984-10-12 | 1986-05-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632683Y2 (en) | 1994-08-24 |