JPS6449695U - - Google Patents

Info

Publication number
JPS6449695U
JPS6449695U JP14392887U JP14392887U JPS6449695U JP S6449695 U JPS6449695 U JP S6449695U JP 14392887 U JP14392887 U JP 14392887U JP 14392887 U JP14392887 U JP 14392887U JP S6449695 U JPS6449695 U JP S6449695U
Authority
JP
Japan
Prior art keywords
rotor
bearing
concave groove
center shaft
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14392887U
Other languages
English (en)
Other versions
JPH068316Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14392887U priority Critical patent/JPH068316Y2/ja
Publication of JPS6449695U publication Critical patent/JPS6449695U/ja
Application granted granted Critical
Publication of JPH068316Y2 publication Critical patent/JPH068316Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】
第１図は本考案の第一実施例の縦断面図、第２
図は本考案の第二の実施例の縦断面図、第３図は
本考案の第三の実施例の縦断面図、第４図は従来
のターボ分子ポンプの断面図である。 １……ケーシング、６……ロータ、６ａ，２６
ａ，３６ａ……凹状溝、７……ロータの中心軸、
８……磁気軸受、９……すべり軸受、１５，２１
５，３１５……振れ減衰装置、１５ａ，２１５ａ
，３１５ａ……振れ減衰装置の先端部分。

Claims (1)

    【実用新案登録請求の範囲】
  1. 上部軸受は永久磁石による磁気軸受、下部軸受
    はすべり軸受を備え、同上部及び下部軸受でロー
    タ中心軸を支承した竪形ターボ分子ポンプにおい
    て、ロータの一部にロータ中心軸と同心の凹状溝
    を設け、同凹状溝にケーシング側に設けたロータ
    の振れ減衰装置の先端部分を挿入したことを特徴
    とする竪形ターボ分子ポンプ。
JP14392887U 1987-09-22 1987-09-22 竪形ターボ分子ポンプ Expired - Lifetime JPH068316Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14392887U JPH068316Y2 (ja) 1987-09-22 1987-09-22 竪形ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14392887U JPH068316Y2 (ja) 1987-09-22 1987-09-22 竪形ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6449695U true JPS6449695U (ja) 1989-03-28
JPH068316Y2 JPH068316Y2 (ja) 1994-03-02

Family

ID=31411188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14392887U Expired - Lifetime JPH068316Y2 (ja) 1987-09-22 1987-09-22 竪形ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH068316Y2 (ja)

Also Published As

Publication number Publication date
JPH068316Y2 (ja) 1994-03-02

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