JPS6450307U - - Google Patents
Info
- Publication number
- JPS6450307U JPS6450307U JP14538287U JP14538287U JPS6450307U JP S6450307 U JPS6450307 U JP S6450307U JP 14538287 U JP14538287 U JP 14538287U JP 14538287 U JP14538287 U JP 14538287U JP S6450307 U JPS6450307 U JP S6450307U
- Authority
- JP
- Japan
- Prior art keywords
- scale
- measured
- scanning head
- optical linear
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 229920003217 poly(methylsilsesquioxane) Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14538287U JPS6450307U (2) | 1987-09-25 | 1987-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14538287U JPS6450307U (2) | 1987-09-25 | 1987-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6450307U true JPS6450307U (2) | 1989-03-28 |
Family
ID=31413920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14538287U Pending JPS6450307U (2) | 1987-09-25 | 1987-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6450307U (2) |
-
1987
- 1987-09-25 JP JP14538287U patent/JPS6450307U/ja active Pending
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