JPS645471U - - Google Patents
Info
- Publication number
- JPS645471U JPS645471U JP9955687U JP9955687U JPS645471U JP S645471 U JPS645471 U JP S645471U JP 9955687 U JP9955687 U JP 9955687U JP 9955687 U JP9955687 U JP 9955687U JP S645471 U JPS645471 U JP S645471U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pressure
- circulation blower
- laser
- laser oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000002123 temporal effect Effects 0.000 description 3
Landscapes
- Lasers (AREA)
Description
第１図は従来及びこの考案の一実施例で用いる
レーザ発振器の概略構成図、第２図はこの考案の
一実施例であるレーザ発振器のガス圧力とブロア
回転数の時間的変化を示す特性図、第３図はレー
ザ発振器のガス圧力とブロア回転数の時間的変化
の原理を示す特性図、第４図は従来のレーザ発振
器のガス圧力とブロア回転数の時間的変化を示す
特性図である。
図において、１：放電管、７：ガス循環ブロア
、１０：圧力センサ、１１：制御装置、である。
なお、図中、同一符号及び同一記号は、同一また
は相当部分を示す。
Fig. 1 is a schematic configuration diagram of a laser oscillator used in the past and an embodiment of this invention, and Fig. 2 is a characteristic diagram showing temporal changes in gas pressure and blower rotation speed of a laser oscillator that is an embodiment of this invention. , Fig. 3 is a characteristic diagram showing the principle of temporal changes in gas pressure and blower rotation speed of a laser oscillator, and Fig. 4 is a characteristic diagram showing temporal changes in gas pressure and blower rotation speed of a conventional laser oscillator. . In the figure, 1: discharge tube, 7: gas circulation blower, 10: pressure sensor, 11: control device.
In addition, in the figures, the same reference numerals and symbols indicate the same or equivalent parts.
Claims (1)
て強制的に循環させ、熱交換器で冷却を行うレー
ザ発振器において、 前記レーザガスの封入圧力を定格圧力以上の所
定の設定ガス圧力とし、前記所定の設定ガス圧力
になつた後、前記ガス循環ブロアの運転を開始し
、前記ガス圧力が定格圧力となつたガス圧力を検
出することによりガス循環ブロアの正常運転状態
を検出する検出手段を具備することを特徴とする
レーザ発振器。[Scope of Claim for Utility Model Registration] In a laser oscillator in which the laser gas in the discharge tube is forcibly circulated by a gas circulation blower and cooled by a heat exchanger, the filling pressure of the laser gas is set to a predetermined set gas that is higher than the rated pressure. After the gas pressure reaches the predetermined set gas pressure, the operation of the gas circulation blower is started, and the normal operating state of the gas circulation blower is detected by detecting the gas pressure at which the gas pressure reaches the rated pressure. A laser oscillator characterized by comprising a detection means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9955687U JPS645471U (en) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9955687U JPS645471U (en) | 1987-06-29 | 1987-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645471U true JPS645471U (en) | 1989-01-12 |
Family
ID=31326823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9955687U Pending JPS645471U (en) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645471U (en) |
-
1987
- 1987-06-29 JP JP9955687U patent/JPS645471U/ja active Pending