JPS6456113A - Process for separating gaseous nitrogen by pressure swinging adsorption - Google Patents

Process for separating gaseous nitrogen by pressure swinging adsorption

Info

Publication number
JPS6456113A
JPS6456113A JP62211161A JP21116187A JPS6456113A JP S6456113 A JPS6456113 A JP S6456113A JP 62211161 A JP62211161 A JP 62211161A JP 21116187 A JP21116187 A JP 21116187A JP S6456113 A JPS6456113 A JP S6456113A
Authority
JP
Japan
Prior art keywords
adsorption
adsorption tank
inlet
parts
part connecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62211161A
Other languages
Japanese (ja)
Inventor
Tsuneo Genma
Takeshi Tamaru
Tetsuhiko Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Chemical Co Ltd
Original Assignee
Kuraray Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Chemical Co Ltd filed Critical Kuraray Chemical Co Ltd
Priority to JP62211161A priority Critical patent/JPS6456113A/en
Publication of JPS6456113A publication Critical patent/JPS6456113A/en
Pending legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

PURPOSE:To produce N2 having high purity by connecting both inlet ends and outlet ends of an adsorption-completed adsorption tank and a regeneration- completed adsorption tank with each other and adjusting a ratio of the gas flow rates at a part connecting the exit parts to each other to that at a part connecting the inlet parts to each other to 3-70%. CONSTITUTION:Compressed air is introduced into an adsorption tank 1 and O2 is removed from the air by being adsorbed to molecular sieve coal, and produced N2 is transported to a storage tank 3. On one hand, an adsorption tank 2 is evacuated with a vacuum pump 4, and regeneration operation is processed in the adsorption tank 2. Then, the pressure of the adsorption tanks 1, 2 is equalized. In this stage, exit parts of both tanks and inlet parts of both tanks are connected with each other by opening a valve 11 and 12 at the same time, and the ratio of gas flows at the part connecting the exit parts with each other to that at the part connecting the inlet part with each other is adjusted to 3-70% by adjusting the opening area of orifices 15, 16. Thus, the purity of produced N2 is improved.
JP62211161A 1987-08-25 1987-08-25 Process for separating gaseous nitrogen by pressure swinging adsorption Pending JPS6456113A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62211161A JPS6456113A (en) 1987-08-25 1987-08-25 Process for separating gaseous nitrogen by pressure swinging adsorption

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62211161A JPS6456113A (en) 1987-08-25 1987-08-25 Process for separating gaseous nitrogen by pressure swinging adsorption

Publications (1)

Publication Number Publication Date
JPS6456113A true JPS6456113A (en) 1989-03-03

Family

ID=16601408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62211161A Pending JPS6456113A (en) 1987-08-25 1987-08-25 Process for separating gaseous nitrogen by pressure swinging adsorption

Country Status (1)

Country Link
JP (1) JPS6456113A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5441558A (en) * 1994-08-09 1995-08-15 Air Products And Chemicals, Inc. High purity nitrogen PSA utilizing controlled internal flows
KR100863084B1 (en) * 2000-12-28 2008-10-13 액셀리스 테크놀로지스, 인크. Ion Acceleration Method and Apparatus in Ion Implantation System

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5441558A (en) * 1994-08-09 1995-08-15 Air Products And Chemicals, Inc. High purity nitrogen PSA utilizing controlled internal flows
KR100863084B1 (en) * 2000-12-28 2008-10-13 액셀리스 테크놀로지스, 인크. Ion Acceleration Method and Apparatus in Ion Implantation System

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