JPS64563A - Writing retouch solution - Google Patents

Writing retouch solution

Info

Publication number
JPS64563A
JPS64563A JP2891088A JP2891088A JPS64563A JP S64563 A JPS64563 A JP S64563A JP 2891088 A JP2891088 A JP 2891088A JP 2891088 A JP2891088 A JP 2891088A JP S64563 A JPS64563 A JP S64563A
Authority
JP
Japan
Prior art keywords
resist pattern
solution
retouching
titled solution
titled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2891088A
Other languages
Japanese (ja)
Other versions
JPH01563A (en
JP2554910B2 (en
Inventor
Hiroshi Komano
Yoichi Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP2891088A priority Critical patent/JP2554910B2/en
Publication of JPH01563A publication Critical patent/JPH01563A/en
Publication of JPS64563A publication Critical patent/JPS64563A/en
Application granted granted Critical
Publication of JP2554910B2 publication Critical patent/JP2554910B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PURPOSE: To obtain the titled solution of a resist pattern having excellent acid resisting property by incorporating a specified copolymer in the titled solution.
CONSTITUTION: The titled solution contains the copolymer obtd. by copolymerizing a rosiny substance and at least one kind of the compd. selected from methacrylic acid and/or acrylic acid, a methacrylic acid derivative, an acrylic acid derivative, styrene and its derivative. Thus, as the titled solution has the high sticking property to the resist pattern, and is not affected with the resist pattern, even if an erroneous retouching is carried out, the repeatedly retouching enables. And, as the film of the titled solution can be peeled at the same condition to that of the resist pattern, the retouch working of the faulty portion of the resist pattern is remarkably simplified, thereby improving the workability of the retouching.
COPYRIGHT: (C)1989,JPO&Japio
JP2891088A 1987-03-20 1988-02-12 Correction fluid Expired - Lifetime JP2554910B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2891088A JP2554910B2 (en) 1987-03-20 1988-02-12 Correction fluid

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6627487 1987-03-20
JP62-66274 1987-03-20
JP2891088A JP2554910B2 (en) 1987-03-20 1988-02-12 Correction fluid

Publications (3)

Publication Number Publication Date
JPH01563A JPH01563A (en) 1989-01-05
JPS64563A true JPS64563A (en) 1989-01-05
JP2554910B2 JP2554910B2 (en) 1996-11-20

Family

ID=26367058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2891088A Expired - Lifetime JP2554910B2 (en) 1987-03-20 1988-02-12 Correction fluid

Country Status (1)

Country Link
JP (1) JP2554910B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514321A (en) * 1983-08-25 1985-04-30 E. I. Du Pont De Nemours And Company Thick film conductor compositions
US4540604A (en) * 1983-08-25 1985-09-10 E. I. Du Pont De Nemours And Company Thick film conductor compositions

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514321A (en) * 1983-08-25 1985-04-30 E. I. Du Pont De Nemours And Company Thick film conductor compositions
US4540604A (en) * 1983-08-25 1985-09-10 E. I. Du Pont De Nemours And Company Thick film conductor compositions

Also Published As

Publication number Publication date
JP2554910B2 (en) 1996-11-20

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