JPS6457142A - Apparatus for inspecting characteristic of optical part - Google Patents

Abstract

PURPOSE:To shorten inspecting time and to improve inspection accuracy, by projecting inspecting light to the area to be inspected of an optical part comprising a lens group, receiving the inspecting light, which has passed through the area to be inspected, at a light receiving region, and operating the output of a light receiving part. CONSTITUTION:Light, which is emitted from a light generating part 1, is inputted into the entire area or a part of the area to be inspected in an optical part 3 through a test pattern 2. The incident light passes through the optical part 3. The light is converted into the light having the amount of light corresponding to the characteristics of the optical part 3. Meanwhile, a light receiving part 4 comprises a one-dimensional or two-dimensional photodetector (e.g., CCD, i.e., charge coupled element) and has a light receiving region corresponding to the area to be inspected in the optical part 3. The light, which has passed through the optical part 3, is projected on the light receiving region of the light receiving part 4. The light is transduced into an electric signal (analog signal) through the photodetector of the light receiving part 4. The electric signal undergoes A/D conversion in an A/D converter 6. The signal is sent to a data processor 7. Various characteristics are computed in the data processor 7 based on the digital signal. The result of the inspection of the optical part 3 is outputted.