JPS6457558A - High-frequency induction-coupled plasma mass spectrometer - Google Patents

High-frequency induction-coupled plasma mass spectrometer

Info

Publication number
JPS6457558A
JPS6457558A JP62213629A JP21362987A JPS6457558A JP S6457558 A JPS6457558 A JP S6457558A JP 62213629 A JP62213629 A JP 62213629A JP 21362987 A JP21362987 A JP 21362987A JP S6457558 A JPS6457558 A JP S6457558A
Authority
JP
Japan
Prior art keywords
axis direction
matching box
mass spectrometer
coupled plasma
frequency induction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62213629A
Other languages
Japanese (ja)
Inventor
Hideki Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP62213629A priority Critical patent/JPS6457558A/en
Publication of JPS6457558A publication Critical patent/JPS6457558A/en
Pending legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To reduce the cost and improve the operability by moving a matching box with a parallel moving mechanism supported by guide rails in three directions: X-axis direction, Y-axis direction, and Z-axis direction, for position adjustment. CONSTITUTION:A flat plate 24 provided with rails 23'a, 23'b on one side on which guides 23a, 23b are slid respectively, guides 26a-26d fixed on the other side of the flat plate 24, and rails 27a, 27b on which they are slid are provided. The first feed screw 21b is rotated to adjust the position of a matching box 1' in the Y-axis direction, the second feed screw 25b is rotated to adjust the position of the matching box 1' in the X-axis direction, and the third feed screw 28b is rotated to adjust the position of the matching box 1' in the Z-axis. The position of the matching box 1' is thus adjusted, and as a result positions of a plasma torch 1 and a nozzle 8 are adjusted.
JP62213629A 1987-08-27 1987-08-27 High-frequency induction-coupled plasma mass spectrometer Pending JPS6457558A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62213629A JPS6457558A (en) 1987-08-27 1987-08-27 High-frequency induction-coupled plasma mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213629A JPS6457558A (en) 1987-08-27 1987-08-27 High-frequency induction-coupled plasma mass spectrometer

Publications (1)

Publication Number Publication Date
JPS6457558A true JPS6457558A (en) 1989-03-03

Family

ID=16642320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213629A Pending JPS6457558A (en) 1987-08-27 1987-08-27 High-frequency induction-coupled plasma mass spectrometer

Country Status (1)

Country Link
JP (1) JPS6457558A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05101805A (en) * 1991-03-12 1993-04-23 Hitachi Ltd Plasma ion source Ultratrace element mass spectrometer
CN107860818A (en) * 2017-11-25 2018-03-30 江苏衡昇仪器有限公司 A kind of three-dimensional coordinate of icp mses

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05101805A (en) * 1991-03-12 1993-04-23 Hitachi Ltd Plasma ion source Ultratrace element mass spectrometer
CN107860818A (en) * 2017-11-25 2018-03-30 江苏衡昇仪器有限公司 A kind of three-dimensional coordinate of icp mses

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