JPS645771A - Retaining unit for processing tool - Google Patents

Retaining unit for processing tool

Info

Publication number
JPS645771A
JPS645771A JP16089587A JP16089587A JPS645771A JP S645771 A JPS645771 A JP S645771A JP 16089587 A JP16089587 A JP 16089587A JP 16089587 A JP16089587 A JP 16089587A JP S645771 A JPS645771 A JP S645771A
Authority
JP
Japan
Prior art keywords
displacement
processing
tool
processing tool
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16089587A
Other languages
Japanese (ja)
Inventor
Katsunobu Ueda
Koji Takamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP16089587A priority Critical patent/JPS645771A/en
Publication of JPS645771A publication Critical patent/JPS645771A/en
Pending legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PURPOSE:To enable the processing of a workpiece always under the predetermined pressure by providing a control device for controlling a micro- displacement element for causing the displacement of a movable part on the basis of the processing pressure of a processing tool detected via a tool retaining detection mechanism. CONSTITUTION:The displacement of a movable part 21 relative to a support fixing part 19 is transmitted to a processing tool 3 via the processing tool displacement part 42 of a tool retaining detector 4. A detecting part 43 fitted to said tool displacement part 42 detects the processing pressure of the processing tool 3, and an electric signal corresponding thereto is outputted to a control unit 5. This control unit 5 drives and controls a micro-displacement element 2 fitted to the support fixing part 19 on the basis of the inputted electric signal, and causes the displacement of the movable part 21, thereby keeping the processing pressure of the processing tool 3 on a workpiece 36 always at the predetermined value.
JP16089587A 1987-06-30 1987-06-30 Retaining unit for processing tool Pending JPS645771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16089587A JPS645771A (en) 1987-06-30 1987-06-30 Retaining unit for processing tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16089587A JPS645771A (en) 1987-06-30 1987-06-30 Retaining unit for processing tool

Publications (1)

Publication Number Publication Date
JPS645771A true JPS645771A (en) 1989-01-10

Family

ID=15724682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16089587A Pending JPS645771A (en) 1987-06-30 1987-06-30 Retaining unit for processing tool

Country Status (1)

Country Link
JP (1) JPS645771A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010172976A (en) * 2009-01-27 2010-08-12 Nikon Corp Polishing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010172976A (en) * 2009-01-27 2010-08-12 Nikon Corp Polishing apparatus

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