JPS6460948A - Mass spectrometer - Google Patents

Abstract

PURPOSE:To make mass analysis of multi-value ion by furnishing an ion charge exchange chamber between the ion source and No.1 analysis place, and by specifying the impression voltage of energy analysis place and the magnetic field intensity of mass analysis place among the No.1 and No.2 analysis places. CONSTITUTION:When ions emitted from an ion source I pass through an electric charge exchange chamber C, reaction with the gas supplied to this chamber causes electric charge transfer to gas molecules supplied from ions, and the ion charge changes. At this time, the energy of the motion of ions, i.e. speed, is held as it is. When the ion emitted from the ion source is expressed as M<n+> and it becomes M<m+> after transfer of electric charge, the ion with change from M<n+> to M<m+> can pass the energy analyzing part Ep, so that the electric field intensity E is multiplied to n/m times as large as the value at the time of one value ion analysis, and the magnetic field intensity B in order for the ion M<m+> to pass the mass analyzing magnetic field Mg is multiplied to n<1/2>/m times to allow measurement by an ion sensor D.