JPS64614A - Manufacture of oxide superconducting film - Google Patents
Manufacture of oxide superconducting filmInfo
- Publication number
- JPS64614A JPS64614A JP62155080A JP15508087A JPS64614A JP S64614 A JPS64614 A JP S64614A JP 62155080 A JP62155080 A JP 62155080A JP 15508087 A JP15508087 A JP 15508087A JP S64614 A JPS64614 A JP S64614A
- Authority
- JP
- Japan
- Prior art keywords
- metals
- target
- thin film
- composition
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62155080A JPS64614A (en) | 1987-06-22 | 1987-06-22 | Manufacture of oxide superconducting film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62155080A JPS64614A (en) | 1987-06-22 | 1987-06-22 | Manufacture of oxide superconducting film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01614A JPH01614A (ja) | 1989-01-05 |
| JPS64614A true JPS64614A (en) | 1989-01-05 |
Family
ID=15598218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62155080A Pending JPS64614A (en) | 1987-06-22 | 1987-06-22 | Manufacture of oxide superconducting film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64614A (ja) |
-
1987
- 1987-06-22 JP JP62155080A patent/JPS64614A/ja active Pending
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