JPS64614A - Manufacture of oxide superconducting film - Google Patents

Manufacture of oxide superconducting film

Info

Publication number
JPS64614A
JPS64614A JP62155080A JP15508087A JPS64614A JP S64614 A JPS64614 A JP S64614A JP 62155080 A JP62155080 A JP 62155080A JP 15508087 A JP15508087 A JP 15508087A JP S64614 A JPS64614 A JP S64614A
Authority
JP
Japan
Prior art keywords
metals
target
thin film
composition
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62155080A
Other languages
English (en)
Other versions
JPH01614A (ja
Inventor
Osamu Michigami
Hidefumi Asano
Keiichi Tanabe
Yujiro Kato
Shugo Kubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP62155080A priority Critical patent/JPS64614A/ja
Publication of JPH01614A publication Critical patent/JPH01614A/ja
Publication of JPS64614A publication Critical patent/JPS64614A/ja
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
JP62155080A 1987-06-22 1987-06-22 Manufacture of oxide superconducting film Pending JPS64614A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62155080A JPS64614A (en) 1987-06-22 1987-06-22 Manufacture of oxide superconducting film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62155080A JPS64614A (en) 1987-06-22 1987-06-22 Manufacture of oxide superconducting film

Publications (2)

Publication Number Publication Date
JPH01614A JPH01614A (ja) 1989-01-05
JPS64614A true JPS64614A (en) 1989-01-05

Family

ID=15598218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62155080A Pending JPS64614A (en) 1987-06-22 1987-06-22 Manufacture of oxide superconducting film

Country Status (1)

Country Link
JP (1) JPS64614A (ja)

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