JPS6463833A - Electrostatic capacitance type differential pressure measuring apparatus - Google Patents
Electrostatic capacitance type differential pressure measuring apparatusInfo
- Publication number
- JPS6463833A JPS6463833A JP22085487A JP22085487A JPS6463833A JP S6463833 A JPS6463833 A JP S6463833A JP 22085487 A JP22085487 A JP 22085487A JP 22085487 A JP22085487 A JP 22085487A JP S6463833 A JPS6463833 A JP S6463833A
- Authority
- JP
- Japan
- Prior art keywords
- center
- measuring
- diaphragm
- differential pressure
- electrostatic capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To eliminate error factors such as temperature error, by forming the entire constitution as a symmetrical structure, and balancing the quantities of sealed liquids. CONSTITUTION:An inner chamber 11, which is provided in a body 1, is divided into two center chambers 12 and 13 by a center diaphragm unit 2. The center diaphragm unit 2 is composed of center diaphragms 21 and 22, a ring shaped spacer 23, and a center diaphragm chamber 24. Sealing diaphragms 31 and 32 are provided at the outer surface of the body 1 and form sealing chambers 311 and 321. A main body 6 comprises a disc 61 and a ring 62. A chamber 611, which is provided in the disc 61, is divided into measuring chambers 631 and 632 with a measuring diaphragm 63. When the sealing diaphragms 31 and 32 receive measuring pressure, the measuring diaphragm 63 is displaced in correspondence with the differential pressure through sealed liquid 101-103. Thus, the electrostatic capacitance between the measuring diaphragm 63 and a fixed electrode 64 is changed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22085487A JPS6463833A (en) | 1987-09-03 | 1987-09-03 | Electrostatic capacitance type differential pressure measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22085487A JPS6463833A (en) | 1987-09-03 | 1987-09-03 | Electrostatic capacitance type differential pressure measuring apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6463833A true JPS6463833A (en) | 1989-03-09 |
| JPH0444221B2 JPH0444221B2 (en) | 1992-07-21 |
Family
ID=16757580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22085487A Granted JPS6463833A (en) | 1987-09-03 | 1987-09-03 | Electrostatic capacitance type differential pressure measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6463833A (en) |
-
1987
- 1987-09-03 JP JP22085487A patent/JPS6463833A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0444221B2 (en) | 1992-07-21 |
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