JPS6464107A - Production of thin film magnetic head - Google Patents

Production of thin film magnetic head

Info

Publication number
JPS6464107A
JPS6464107A JP22050787A JP22050787A JPS6464107A JP S6464107 A JPS6464107 A JP S6464107A JP 22050787 A JP22050787 A JP 22050787A JP 22050787 A JP22050787 A JP 22050787A JP S6464107 A JPS6464107 A JP S6464107A
Authority
JP
Japan
Prior art keywords
layer
coil conductor
films
layers
conductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22050787A
Other languages
Japanese (ja)
Other versions
JP2709387B2 (en
Inventor
Osamu Shimizu
Kanji Nakanishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP62220507A priority Critical patent/JP2709387B2/en
Publication of JPS6464107A publication Critical patent/JPS6464107A/en
Application granted granted Critical
Publication of JP2709387B2 publication Critical patent/JP2709387B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To obtain a titled head having good electromagnetic conversion characteristics by forming the films of Ti layers which are disposed between an insulating layer and coil conductor layer and tightly adheres the two layers by a sputtering method at >=100 deg.C substrate temp. CONSTITUTION:The films of a lower magnetic layer 2, the insulating layer 3, the Ti layer 4, the coil conductor layer 5, and the Ti layer 6 are successively formed by sputtering on the substrate 1 and thereafter, a photoresist is coated on the coil conductor layer 5 and is exposed through a mask material, following which the unexposed part of the photoresist is subjected to ion milling. The coil conductor layer 5 is partly removed by this ion milling as shown by hatching in the figure, by which the underlying insulating layer 3 is formed to the rugged shape of the roughened surface. This ruggedness can be decreased if the films of the Ti layers are formed at >=100 deg.C substrate temp. The thin film magnetic head by which the good electromagnetic conversion characteristics are obtainable is thus produced.
JP62220507A 1987-09-04 1987-09-04 Method for manufacturing thin-film magnetic head Expired - Lifetime JP2709387B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62220507A JP2709387B2 (en) 1987-09-04 1987-09-04 Method for manufacturing thin-film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62220507A JP2709387B2 (en) 1987-09-04 1987-09-04 Method for manufacturing thin-film magnetic head

Publications (2)

Publication Number Publication Date
JPS6464107A true JPS6464107A (en) 1989-03-10
JP2709387B2 JP2709387B2 (en) 1998-02-04

Family

ID=16752111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62220507A Expired - Lifetime JP2709387B2 (en) 1987-09-04 1987-09-04 Method for manufacturing thin-film magnetic head

Country Status (1)

Country Link
JP (1) JP2709387B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5369539A (en) * 1990-10-25 1994-11-29 Fuji Photo Film Co., Ltd. Thin film magnetic head having improved coil conductor layer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5567928A (en) * 1978-11-13 1980-05-22 Fujitsu Ltd Forming method for closely contacted layer of thin-film magnetic head
JPS6028014A (en) * 1983-07-25 1985-02-13 Canon Inc thin film magnetic head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5567928A (en) * 1978-11-13 1980-05-22 Fujitsu Ltd Forming method for closely contacted layer of thin-film magnetic head
JPS6028014A (en) * 1983-07-25 1985-02-13 Canon Inc thin film magnetic head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5369539A (en) * 1990-10-25 1994-11-29 Fuji Photo Film Co., Ltd. Thin film magnetic head having improved coil conductor layer

Also Published As

Publication number Publication date
JP2709387B2 (en) 1998-02-04

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