JPS6464151A - Magneto-optical recording medium - Google Patents

Abstract

PURPOSE:To obtain grooves having high depth accuracy and to decrease intra- surface fluctuations so as to improve C/N by forming rugged patterns on a glass substrate by using a resist at the time of providing a recording layer on the substrate having the ruggedness to constitute a magneto-optical recording medium. CONSTITUTION:The positive type resist 2 is applied by a spin coating method on the glass substrate 1 which is subjected to optical polishing and has about 1.2mm thickness. The film thickness distribution at this time is preferably adjusted to + or -30Angstrom accuracy with respect to 1/8lambda when said distribution is measured by an ellipsometer. After the substrate 1 is baked for 30min in an atmosphere kept at 90 deg.C, the substrate is subjected to laser beam cutting, by which 46-110mm areas having 1.6mum track pitch and about 0.6mum groove width are generated. The resist is then subjected to developing and rebaking treatment, by which the glass substrate having the ruggedness is obtd. Protective films 3 and 5 consisting of AlN, etc., are deposited over the entire surface so as to sandwich the recording film 4 and another glass substrate 7 is stuck via the resin film 6 thereon.