JPS6465254A - Production of thin metallic film - Google Patents

Abstract

PURPOSE:To stabilize the traveling of a substrate which consists of a high- polymer material and travels along the peripheral face of a cylindrical can and to produce a thin metallic film without wrinkling the film by depositing the thin metallic film by evaporation on the substrate, then projecting X-rays to the substrate or UV rays to the rear face thereof. CONSTITUTION:The substrate 1 consisting of the high-polymer material is run along the peripheral face of the cylindrical can 2 which is coated with an insulator such as SiO2 at need in a vacuum deposition device. A potential difference is applied between this substrate 1 and the can 2 from a power supply 8 to improve the adhesiveness. The evaporating metal from a vapor source 5 is deposited by vacuum evaporation on this substrate 1 through an aperture S of a shielding plate 9 to form the thin metallic film thereon. The X-rays 11 are projected from an X-ray source 10 to the substrate 1 after the formation of the above-mentioned thin metallic film at this time. This projection is preferably executed just before or after the substrate 1 detaches from the can 2. The electrostatic charge of the substrate 1 is removed by this projection. The traveling of the substrate 1 is thereby stabilized and the wrinkle-free thin metallic film is formed over a long length.