JPS6465406A - Interferometer for flatness measurement - Google Patents

Interferometer for flatness measurement

Info

Publication number
JPS6465406A
JPS6465406A JP62221458A JP22145887A JPS6465406A JP S6465406 A JPS6465406 A JP S6465406A JP 62221458 A JP62221458 A JP 62221458A JP 22145887 A JP22145887 A JP 22145887A JP S6465406 A JPS6465406 A JP S6465406A
Authority
JP
Japan
Prior art keywords
mirror
semitransparent
reflected light
optical path
mirrors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62221458A
Other languages
Japanese (ja)
Other versions
JPH0617787B2 (en
Inventor
Hiroshi Mizojiri
Katsuhiko Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIZOJIRI KOGAKU KOGYOSHO KK
Original Assignee
MIZOJIRI KOGAKU KOGYOSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIZOJIRI KOGAKU KOGYOSHO KK filed Critical MIZOJIRI KOGAKU KOGYOSHO KK
Priority to JP62221458A priority Critical patent/JPH0617787B2/en
Publication of JPS6465406A publication Critical patent/JPS6465406A/en
Publication of JPH0617787B2 publication Critical patent/JPH0617787B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To inspect and measure the flatness of an object surface when the size of the object surface is large by providing two semitransparent-mirrors and two reflecting mirrors. CONSTITUTION:The interferometer is equipped with the two semitransparent mirrors and two total reflecting mirrors M1 and M2. Then the 1st semitransparent-mirror m1 is put in the optical path of projection light l0 which is parallel luminous flux incident slantingly on a sample surface S. Then alpha1st total reflecting mirrors M1 is provided at right angles to the optical path of reflected light l1 of the projection light l0 from the semitransparent-mirror m1. Then alpha 2nd total reflecting mirror M2 is provided on the optical path of reflected light l3 obtained by making the projection light l0 transmitted through the semitransparent-mirror m1 on the sample surface S. Lastly, the 2nd half- mirror m2 is put in the optical path of reflected light l2 after the reflected light l2 of the reflected light l1 from the total reflecting mirror M1 is transmitted through the semitransparent-mirror m1. Consequently, the flatness is inspected and measured even when the side of the object surface is large.
JP62221458A 1987-09-04 1987-09-04 Interferometer for flatness measurement Expired - Lifetime JPH0617787B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62221458A JPH0617787B2 (en) 1987-09-04 1987-09-04 Interferometer for flatness measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62221458A JPH0617787B2 (en) 1987-09-04 1987-09-04 Interferometer for flatness measurement

Publications (2)

Publication Number Publication Date
JPS6465406A true JPS6465406A (en) 1989-03-10
JPH0617787B2 JPH0617787B2 (en) 1994-03-09

Family

ID=16767039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62221458A Expired - Lifetime JPH0617787B2 (en) 1987-09-04 1987-09-04 Interferometer for flatness measurement

Country Status (1)

Country Link
JP (1) JPH0617787B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650709A (en) * 1992-06-15 1994-02-25 Hughes Aircraft Co Full aperture interferometer for grazing incidence optics
JP2002206914A (en) * 2001-01-11 2002-07-26 Fuji Photo Optical Co Ltd Grazing incidence interferometer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127109A (en) * 1982-01-25 1983-07-28 Minolta Camera Co Ltd Interferometer for measuring surface shape of mirror face

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127109A (en) * 1982-01-25 1983-07-28 Minolta Camera Co Ltd Interferometer for measuring surface shape of mirror face

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650709A (en) * 1992-06-15 1994-02-25 Hughes Aircraft Co Full aperture interferometer for grazing incidence optics
JP2002206914A (en) * 2001-01-11 2002-07-26 Fuji Photo Optical Co Ltd Grazing incidence interferometer

Also Published As

Publication number Publication date
JPH0617787B2 (en) 1994-03-09

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