JPS6466930A - Supply system of material gas for semiconductor production device - Google Patents

Supply system of material gas for semiconductor production device

Info

Publication number
JPS6466930A
JPS6466930A JP22353487A JP22353487A JPS6466930A JP S6466930 A JPS6466930 A JP S6466930A JP 22353487 A JP22353487 A JP 22353487A JP 22353487 A JP22353487 A JP 22353487A JP S6466930 A JPS6466930 A JP S6466930A
Authority
JP
Japan
Prior art keywords
valve
gas
production device
semiconductor production
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22353487A
Other languages
English (en)
Other versions
JPH0573325B2 (ja
Inventor
Takamoto Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP22353487A priority Critical patent/JPS6466930A/ja
Publication of JPS6466930A publication Critical patent/JPS6466930A/ja
Publication of JPH0573325B2 publication Critical patent/JPH0573325B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP22353487A 1987-09-07 1987-09-07 Supply system of material gas for semiconductor production device Granted JPS6466930A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22353487A JPS6466930A (en) 1987-09-07 1987-09-07 Supply system of material gas for semiconductor production device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22353487A JPS6466930A (en) 1987-09-07 1987-09-07 Supply system of material gas for semiconductor production device

Publications (2)

Publication Number Publication Date
JPS6466930A true JPS6466930A (en) 1989-03-13
JPH0573325B2 JPH0573325B2 (ja) 1993-10-14

Family

ID=16799660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22353487A Granted JPS6466930A (en) 1987-09-07 1987-09-07 Supply system of material gas for semiconductor production device

Country Status (1)

Country Link
JP (1) JPS6466930A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0741074U (ja) * 1993-12-24 1995-07-21 日立粉末冶金株式会社 電磁スプリングクラッチ

Also Published As

Publication number Publication date
JPH0573325B2 (ja) 1993-10-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees