JPS6467741A - Manufacture of magneto-optical recording medium - Google Patents
Manufacture of magneto-optical recording mediumInfo
- Publication number
- JPS6467741A JPS6467741A JP22571387A JP22571387A JPS6467741A JP S6467741 A JPS6467741 A JP S6467741A JP 22571387 A JP22571387 A JP 22571387A JP 22571387 A JP22571387 A JP 22571387A JP S6467741 A JPS6467741 A JP S6467741A
- Authority
- JP
- Japan
- Prior art keywords
- spatering
- target
- targets
- substrate surface
- magneto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 239000000956 alloy Substances 0.000 abstract 2
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Abstract
PURPOSE:To improve the accumulating speed of spatering by spatering the plural numbers of targets which are mutually inclined to the both of a substrate surface and the other target. CONSTITUTION:The plural numbers of targets 101 and 102, which are mutually inclined to both of a substrate surface 105 and the other target, are spatered. By inclining the targets to the substrate surface 105, the spater grain of a specified outgoing angle can be selectively stuck on the substrate. Thus, component distribution, which is generated when an alloy thin film is made from an alloy target, can be suppressed and a spatering rate can be improved by utilizing that the number of the grain to be spatered in an inclining direction to the normal of a target surface is large. Thus, the speed to accumulate a material by the spatering can be increased.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22571387A JPS6467741A (en) | 1987-09-09 | 1987-09-09 | Manufacture of magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22571387A JPS6467741A (en) | 1987-09-09 | 1987-09-09 | Manufacture of magneto-optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6467741A true JPS6467741A (en) | 1989-03-14 |
Family
ID=16833640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22571387A Pending JPS6467741A (en) | 1987-09-09 | 1987-09-09 | Manufacture of magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6467741A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1305033C (en) * | 2002-06-30 | 2007-03-14 | 华中科技大学 | Non-crystal vertical magnetic film for high density vertical magnetic record |
-
1987
- 1987-09-09 JP JP22571387A patent/JPS6467741A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1305033C (en) * | 2002-06-30 | 2007-03-14 | 华中科技大学 | Non-crystal vertical magnetic film for high density vertical magnetic record |
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