JPS6467932A - Semiconductor wafer cassette conveyor - Google Patents

Semiconductor wafer cassette conveyor

Info

Publication number
JPS6467932A
JPS6467932A JP22500987A JP22500987A JPS6467932A JP S6467932 A JPS6467932 A JP S6467932A JP 22500987 A JP22500987 A JP 22500987A JP 22500987 A JP22500987 A JP 22500987A JP S6467932 A JPS6467932 A JP S6467932A
Authority
JP
Japan
Prior art keywords
cassette
conveying means
conveyance
high speed
efficiently
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22500987A
Other languages
Japanese (ja)
Inventor
Junji Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP22500987A priority Critical patent/JPS6467932A/en
Publication of JPS6467932A publication Critical patent/JPS6467932A/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To shorten the conveying time of an urgent cassette and to obtain a cassette conveyor in which the conveyance of a reference cassette is not disordered by so stereoscopically disposing two systems of efficiently conveying means and high speed conveying means as not to disturb each other in the conveyance between processor groups. CONSTITUTION:High speed conveying means 12 so stereoscopically disposed as not to disturb conveyance to each other simultaneously process in parallel with efficiently conveying means 11 except the operations of feeding robots 8a, 8b. When a cassette 2 containing a wafer 1 is of an urgent cassette, a bearer 15 and a placing base 16 respectively containing motors are traveled in X-axis and Y-axis traveling passages 13, 14 as the high speed conveying means to shorten the conveying time. In case of a reference cassette, it is conveyed by the efficiently conveying means without disordering the flow of matters.
JP22500987A 1987-09-08 1987-09-08 Semiconductor wafer cassette conveyor Pending JPS6467932A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22500987A JPS6467932A (en) 1987-09-08 1987-09-08 Semiconductor wafer cassette conveyor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22500987A JPS6467932A (en) 1987-09-08 1987-09-08 Semiconductor wafer cassette conveyor

Publications (1)

Publication Number Publication Date
JPS6467932A true JPS6467932A (en) 1989-03-14

Family

ID=16822647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22500987A Pending JPS6467932A (en) 1987-09-08 1987-09-08 Semiconductor wafer cassette conveyor

Country Status (1)

Country Link
JP (1) JPS6467932A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6283692B1 (en) * 1998-12-01 2001-09-04 Applied Materials, Inc. Apparatus for storing and moving a cassette
JP2005223031A (en) * 2004-02-04 2005-08-18 Renesas Technology Corp Manufacturing method of semiconductor integrated circuit device
US7234908B2 (en) 2000-03-16 2007-06-26 Applied Materials, Inc. Apparatus for storing and moving a cassette
US7433756B2 (en) 2003-11-13 2008-10-07 Applied Materials, Inc. Calibration of high speed loader to substrate transport system
US7577487B2 (en) 2005-09-14 2009-08-18 Applied Materials, Inc. Methods and apparatus for a band to band transfer module
US7806648B2 (en) 2006-04-14 2010-10-05 Murata Kikai Kabushiki Kaisha Transportation system and transportation method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6283692B1 (en) * 1998-12-01 2001-09-04 Applied Materials, Inc. Apparatus for storing and moving a cassette
US7637707B2 (en) 1998-12-01 2009-12-29 Applied Materials, Inc. Apparatus for storing and moving a cassette
US7234908B2 (en) 2000-03-16 2007-06-26 Applied Materials, Inc. Apparatus for storing and moving a cassette
US7433756B2 (en) 2003-11-13 2008-10-07 Applied Materials, Inc. Calibration of high speed loader to substrate transport system
US7912576B2 (en) 2003-11-13 2011-03-22 Applied Materials, Inc. Calibration of high speed loader to substrate transport system
JP2005223031A (en) * 2004-02-04 2005-08-18 Renesas Technology Corp Manufacturing method of semiconductor integrated circuit device
US7577487B2 (en) 2005-09-14 2009-08-18 Applied Materials, Inc. Methods and apparatus for a band to band transfer module
US7806648B2 (en) 2006-04-14 2010-10-05 Murata Kikai Kabushiki Kaisha Transportation system and transportation method

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