JPS6467960A - Color solid-state image sensing element - Google Patents
Color solid-state image sensing elementInfo
- Publication number
- JPS6467960A JPS6467960A JP22387587A JP22387587A JPS6467960A JP S6467960 A JPS6467960 A JP S6467960A JP 22387587 A JP22387587 A JP 22387587A JP 22387587 A JP22387587 A JP 22387587A JP S6467960 A JPS6467960 A JP S6467960A
- Authority
- JP
- Japan
- Prior art keywords
- sensing element
- image sensing
- state image
- color solid
- conductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 abstract 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 230000007547 defect Effects 0.000 abstract 1
- 239000000428 dust Substances 0.000 abstract 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Transforming Light Signals Into Electric Signals (AREA)
- Color Television Image Signal Generators (AREA)
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE:To suppress the charging potential of the surface of a color solid-state image sensing element to a low value, to prevent dusts from being attracted to the sensing element and to provide the solid-state image sensing element having no image defect by providing a transparent conductor layer between the surface of the sensing element and a color filter, and connecting the conductor layer to a ground terminal provided to the sensing element. CONSTITUTION:An aluminum optical sheet 23 is provided on a semiconductor substrate on which a P-N junction photodiode and a charge transfer unit are integrated. The sheet 23 is so provided as to be electrically connected to the ground electrode of an image sensing element. Then, a transparent conductor layer 4 made of In2O3 is provided on the shield 23, and a protective film 24 made of Si3N4 is provided thereon. Thereafter, a color filter 3 is provided on the film 24 to obtain a color solid-state image sensing element. The surface potential of the color solid-state image sensing element is -5volts or below, and dust does not substantially adhere thereto.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22387587A JPS6467960A (en) | 1987-09-09 | 1987-09-09 | Color solid-state image sensing element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22387587A JPS6467960A (en) | 1987-09-09 | 1987-09-09 | Color solid-state image sensing element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6467960A true JPS6467960A (en) | 1989-03-14 |
Family
ID=16805078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22387587A Pending JPS6467960A (en) | 1987-09-09 | 1987-09-09 | Color solid-state image sensing element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6467960A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000029132A (en) * | 1998-07-13 | 2000-01-28 | Nikon Corp | Optical equipment |
| JP2001518703A (en) * | 1997-09-26 | 2001-10-16 | インテル・コーポレーション | Method and apparatus for using light-blocking layer to change pixel color responsivity |
| JP2007311533A (en) * | 2006-05-18 | 2007-11-29 | Tdk Corp | Optical semiconductor device and manufacturing method thereof |
| US7961244B2 (en) | 1998-03-31 | 2011-06-14 | Nikon Corporation | Optical filter and optical device provided with this optical filter |
-
1987
- 1987-09-09 JP JP22387587A patent/JPS6467960A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001518703A (en) * | 1997-09-26 | 2001-10-16 | インテル・コーポレーション | Method and apparatus for using light-blocking layer to change pixel color responsivity |
| US7961244B2 (en) | 1998-03-31 | 2011-06-14 | Nikon Corporation | Optical filter and optical device provided with this optical filter |
| JP2000029132A (en) * | 1998-07-13 | 2000-01-28 | Nikon Corp | Optical equipment |
| JP2007311533A (en) * | 2006-05-18 | 2007-11-29 | Tdk Corp | Optical semiconductor device and manufacturing method thereof |
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