JPS646836A - Optical force sensor - Google Patents

Optical force sensor

Info

Publication number
JPS646836A
JPS646836A JP16109487A JP16109487A JPS646836A JP S646836 A JPS646836 A JP S646836A JP 16109487 A JP16109487 A JP 16109487A JP 16109487 A JP16109487 A JP 16109487A JP S646836 A JPS646836 A JP S646836A
Authority
JP
Japan
Prior art keywords
elastic body
rigid
detector
optical
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16109487A
Other languages
Japanese (ja)
Inventor
Shigeo Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Priority to JP16109487A priority Critical patent/JPS646836A/en
Publication of JPS646836A publication Critical patent/JPS646836A/en
Pending legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

PURPOSE:To simplify the structure of an optical sensor and to improve its accuracy by providing an elastic body between a couple of rigid bodies to which a force to be measured is applied and measuring the fine displacement of this elastic body by an optical displacement detector. CONSTITUTION:The force sensor 1 is equipped with the couple of rigid bodies 2 and 3 arranged opposite each other and the leaf spring type elastic body 4 is provided between the rigid bodies 2 and 3. An optical variation detector 6 which detects the quantity of displacement of the center part of the elastic body 4 is provided between the rigid body 2 and elastic body 4. This detector 6 consists of a photomicrosensor 7 fitted to the rigid body 2 and a light shield plate 8 fitted in the center of the elastic body 4. The light shield plate 8 cuts off light 10 by moving up and down as the elastic body 4 deforms to vary the quantity of photodetection of a phototransistor 11 greatly.
JP16109487A 1987-06-30 1987-06-30 Optical force sensor Pending JPS646836A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16109487A JPS646836A (en) 1987-06-30 1987-06-30 Optical force sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16109487A JPS646836A (en) 1987-06-30 1987-06-30 Optical force sensor

Publications (1)

Publication Number Publication Date
JPS646836A true JPS646836A (en) 1989-01-11

Family

ID=15728492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16109487A Pending JPS646836A (en) 1987-06-30 1987-06-30 Optical force sensor

Country Status (1)

Country Link
JP (1) JPS646836A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008512690A (en) * 2004-09-10 2008-04-24 シエフレル・コマンデイトゲゼルシヤフト Method for detecting stress in a bearing device
EP2034287A1 (en) * 2007-09-10 2009-03-11 Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO Optical sensor for measuring a force distribution
WO2018124059A1 (en) * 2016-12-28 2018-07-05 Ntn株式会社 Load sensor and electric brake device
JP2018535437A (en) * 2015-11-30 2018-11-29 リンク エンジニアリング カンパニー High-load high-resolution instrumentation spindle or load cell
KR20220099043A (en) * 2021-01-05 2022-07-12 경북대학교 산학협력단 Optical finger force measurement sensor
US11662200B2 (en) 2018-04-18 2023-05-30 Logicdata Electronic & Software Entwiclungs Gmbh Sensor assembly, actuator, control system, electrically adjustable piece of furniture and method for operating an electrically adjustable piece of furniture

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164229A (en) * 1984-02-07 1985-08-27 Nec Corp Force converter
JPS60177233A (en) * 1984-02-24 1985-09-11 Nippon Telegr & Teleph Corp <Ntt> multi force detector
JPS60178626A (en) * 1984-02-24 1985-09-12 Toshiba Corp Formation of resist pattern and resist treater

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164229A (en) * 1984-02-07 1985-08-27 Nec Corp Force converter
JPS60177233A (en) * 1984-02-24 1985-09-11 Nippon Telegr & Teleph Corp <Ntt> multi force detector
JPS60178626A (en) * 1984-02-24 1985-09-12 Toshiba Corp Formation of resist pattern and resist treater

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008512690A (en) * 2004-09-10 2008-04-24 シエフレル・コマンデイトゲゼルシヤフト Method for detecting stress in a bearing device
EP2034287A1 (en) * 2007-09-10 2009-03-11 Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO Optical sensor for measuring a force distribution
WO2009035324A1 (en) * 2007-09-10 2009-03-19 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Optical sensor for measuring a force distribution
US8749522B2 (en) 2007-09-10 2014-06-10 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Optical sensor for measuring a force distribution
JP2018535437A (en) * 2015-11-30 2018-11-29 リンク エンジニアリング カンパニー High-load high-resolution instrumentation spindle or load cell
WO2018124059A1 (en) * 2016-12-28 2018-07-05 Ntn株式会社 Load sensor and electric brake device
US11118985B2 (en) 2016-12-28 2021-09-14 Ntn Corporation Load sensor and electromechanical brake system
US11662200B2 (en) 2018-04-18 2023-05-30 Logicdata Electronic & Software Entwiclungs Gmbh Sensor assembly, actuator, control system, electrically adjustable piece of furniture and method for operating an electrically adjustable piece of furniture
KR20220099043A (en) * 2021-01-05 2022-07-12 경북대학교 산학협력단 Optical finger force measurement sensor

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