JPS6468467A - Apparatus for producing thin metallic film - Google Patents

Abstract

PURPOSE:To prevent a high-polymer film from being thermally deteriorated by winding the film plural times on a cylindrical can and forming vapor deposited films of prescribed thicknesses on the film from plural pieces of metal supplying sources at the time of winding the high-polymer film on the cylindrical can and depositing the thin metallic films by evaporation from the metal supplying sources. CONSTITUTION:The high-polymer film 8 supplied from a feed roller 11 is wound around the cylindrical can 7 which is inclined and rotated by an inlet side inclining post 12 and after the film is spirally wound around the can plural times, the inclination of the film 8 is corrected by an outlet side inclining post 9 and the film is taken up on a take-up roller 13. Plural pieces of the metal sources 14-16 for vapor deposition are disposed in the position under the can 7 where the film 8 passes. The vapor deposited metal films are then deposited by evaporation to the prescribed thicknesses on the film. The temp. rise of the film in one time of vapor deposition position is low and since the can is cooled before the film comes to the next vapor deposition position, the high-polymer film is prevented from being heated to the high temp. at which the film is thermally deteriorated. The vapor deposited metal films are thus formed on the surface of the film.