JPS646901A - Protective film for optical purpose - Google Patents
Protective film for optical purposeInfo
- Publication number
- JPS646901A JPS646901A JP62163369A JP16336987A JPS646901A JP S646901 A JPS646901 A JP S646901A JP 62163369 A JP62163369 A JP 62163369A JP 16336987 A JP16336987 A JP 16336987A JP S646901 A JPS646901 A JP S646901A
- Authority
- JP
- Japan
- Prior art keywords
- film
- boron
- silicon
- protective film
- optical purpose
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 title abstract 3
- 230000003287 optical effect Effects 0.000 title abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052796 boron Inorganic materials 0.000 abstract 4
- 229910052710 silicon Inorganic materials 0.000 abstract 4
- 239000010703 silicon Substances 0.000 abstract 4
- 229910052757 nitrogen Inorganic materials 0.000 abstract 2
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62163369A JPH07111481B2 (ja) | 1987-06-29 | 1987-06-29 | 光学用保護膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62163369A JPH07111481B2 (ja) | 1987-06-29 | 1987-06-29 | 光学用保護膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS646901A true JPS646901A (en) | 1989-01-11 |
| JPH07111481B2 JPH07111481B2 (ja) | 1995-11-29 |
Family
ID=15772576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62163369A Expired - Fee Related JPH07111481B2 (ja) | 1987-06-29 | 1987-06-29 | 光学用保護膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07111481B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012200106A1 (de) * | 2012-01-05 | 2013-07-11 | Von Ardenne Anlagentechnik Gmbh | Transparente Klimaschutzschicht für ein Reflexionsschichtsystem und Verfahren zu deren Herstellung |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58185428A (ja) * | 1982-04-20 | 1983-10-29 | Sharp Corp | 光電部材 |
-
1987
- 1987-06-29 JP JP62163369A patent/JPH07111481B2/ja not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58185428A (ja) * | 1982-04-20 | 1983-10-29 | Sharp Corp | 光電部材 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012200106A1 (de) * | 2012-01-05 | 2013-07-11 | Von Ardenne Anlagentechnik Gmbh | Transparente Klimaschutzschicht für ein Reflexionsschichtsystem und Verfahren zu deren Herstellung |
| DE102012200106A8 (de) * | 2012-01-05 | 2013-09-12 | Von Ardenne Anlagentechnik Gmbh | Transparente Klimaschutzschicht für ein Reflexionsschichtsystem und Verfahren zu deren Herstellung |
| DE102012200106B4 (de) * | 2012-01-05 | 2016-03-24 | Von Ardenne Gmbh | Reflexionsschichtsystem mit transparenter Klimaschutzschicht, Verfahren zu dessen Herstellung sowie Substrat mit einem solchen Reflexionsschichtsystem |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07111481B2 (ja) | 1995-11-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |