JPS6471133A - Device for manufacturing semiconductor - Google Patents
Device for manufacturing semiconductorInfo
- Publication number
- JPS6471133A JPS6471133A JP22649687A JP22649687A JPS6471133A JP S6471133 A JPS6471133 A JP S6471133A JP 22649687 A JP22649687 A JP 22649687A JP 22649687 A JP22649687 A JP 22649687A JP S6471133 A JPS6471133 A JP S6471133A
- Authority
- JP
- Japan
- Prior art keywords
- tank
- pure water
- resistivity
- solenoid valve
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 10
- 238000005406 washing Methods 0.000 abstract 4
- 238000005259 measurement Methods 0.000 abstract 1
- 238000011084 recovery Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE:To reduce the usage of pure water in the pure water washing of a wafer, and to obtain a positive washing effect by controlling the quantity of pure water supplied in a water washing tank on the basis of resistivity detected by a resistivity detecting cell. CONSTITUTION:A first tank 102 adjusts the temperature of chemicals injected at a fixed temperature by a heater 123 for the first tank and a liquid- temperature detecting sensor 124 for the first tank. The bottom of the tank 102 is provided with a drainage means opened and closed by a drainage solenoid valve 121 for the first tank. When a carrier is carried into a second tank 103, a pure water supply solenoid valve 118 for the second tank and a pure water saving solenoid valve 119 for the second tank are turned ON and operated. A resistivity/conductivity detecting cell 13 measures the data of pure water in the tank 103 until the carrier is carried out after a time when pure water in the tank 103 overflows. When the result of measurement higher than resistivity recovery data is acquired, the valve 118 is turned OFF, and pure water is fed only by a pure water saving solenoid valve 11 for the second tank. Accordingly, a positive washing effect is obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22649687A JPS6471133A (en) | 1987-09-11 | 1987-09-11 | Device for manufacturing semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22649687A JPS6471133A (en) | 1987-09-11 | 1987-09-11 | Device for manufacturing semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6471133A true JPS6471133A (en) | 1989-03-16 |
Family
ID=16846018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22649687A Pending JPS6471133A (en) | 1987-09-11 | 1987-09-11 | Device for manufacturing semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6471133A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02285635A (en) * | 1989-04-26 | 1990-11-22 | Matsushita Electric Ind Co Ltd | Semiconductor wafer carrier cleaning device |
| JP2016049534A (en) * | 2014-08-29 | 2016-04-11 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method of glass substrate, and manufacturing device of the glass substrate |
-
1987
- 1987-09-11 JP JP22649687A patent/JPS6471133A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02285635A (en) * | 1989-04-26 | 1990-11-22 | Matsushita Electric Ind Co Ltd | Semiconductor wafer carrier cleaning device |
| JP2016049534A (en) * | 2014-08-29 | 2016-04-11 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method of glass substrate, and manufacturing device of the glass substrate |
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