JPS6471190A - Discharge type excimer laser device - Google Patents

Discharge type excimer laser device

Info

Publication number
JPS6471190A
JPS6471190A JP62227923A JP22792387A JPS6471190A JP S6471190 A JPS6471190 A JP S6471190A JP 62227923 A JP62227923 A JP 62227923A JP 22792387 A JP22792387 A JP 22792387A JP S6471190 A JPS6471190 A JP S6471190A
Authority
JP
Japan
Prior art keywords
capacitor
coil
power source
charging power
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62227923A
Other languages
Japanese (ja)
Inventor
Hideo Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62227923A priority Critical patent/JPS6471190A/en
Publication of JPS6471190A publication Critical patent/JPS6471190A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To speed up the rate of threshold voltage and make discharge uniform, by mounting a gap for pre-ionization in parallel to capacitors located between the first charging power source and an electrode and forming a capacity migration circuit according to the capacitors and inductances. CONSTITUTION:After turning a switch SW 2 OFF, the fourth capacitor 4 is charged by a current passing from the first charging power source V1 to ground through a coil 7, a capacitor C4, and the coil 4. Simultaneously, the second capacitor 2 is charged by a current passing from the second charging power source V2 to ground through inductance L5, resistance R1, capacitor C2, inductance L2, and the coil 4. If the switch SW 2 is turned ON, electric charge which is changed into the capacitor 4 performs capacity migration into the capacitor C1. When the charged voltage of the first capacitor C1 comes to around a peak value, the gap of a gap electrode G allows an ultraviolet spark to start flying so as to have continuity. The ultraviolet spark pre-ionizes a laser gas.
JP62227923A 1987-09-11 1987-09-11 Discharge type excimer laser device Pending JPS6471190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62227923A JPS6471190A (en) 1987-09-11 1987-09-11 Discharge type excimer laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62227923A JPS6471190A (en) 1987-09-11 1987-09-11 Discharge type excimer laser device

Publications (1)

Publication Number Publication Date
JPS6471190A true JPS6471190A (en) 1989-03-16

Family

ID=16868413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62227923A Pending JPS6471190A (en) 1987-09-11 1987-09-11 Discharge type excimer laser device

Country Status (1)

Country Link
JP (1) JPS6471190A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02117187A (en) * 1988-10-27 1990-05-01 Toshiba Corp Pulse laser apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02117187A (en) * 1988-10-27 1990-05-01 Toshiba Corp Pulse laser apparatus

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