JPS6472700A - Ultrasonic transducer and its manufacture - Google Patents

Ultrasonic transducer and its manufacture

Info

Publication number
JPS6472700A
JPS6472700A JP22829187A JP22829187A JPS6472700A JP S6472700 A JPS6472700 A JP S6472700A JP 22829187 A JP22829187 A JP 22829187A JP 22829187 A JP22829187 A JP 22829187A JP S6472700 A JPS6472700 A JP S6472700A
Authority
JP
Japan
Prior art keywords
metallic film
substrate
film
wave
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22829187A
Other languages
Japanese (ja)
Other versions
JPH0552120B2 (en
Inventor
Kenichiro Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP22829187A priority Critical patent/JPS6472700A/en
Publication of JPS6472700A publication Critical patent/JPS6472700A/en
Publication of JPH0552120B2 publication Critical patent/JPH0552120B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)

Abstract

PURPOSE:To set a characteristic to uniform, highly sensitive, miniature and light by forming a first electrode so that it covers an opening hole provided on a substrate different from a semiconductor substrate and adhering the substrate and the semiconductor substrate. CONSTITUTION:A metallic film 10 is adhered to a glass substrate 20 and it transmits and receives an ultrasonic wave through the opening hole 22. At the same time, it has a function as an electrically upper electrode. The metallic film 10 vertically vibrates on the etching hole 12 of a non-through hole, which is made in a silicon substrate 1, and the ultrasonic wave is transmitted and received. The metallic film 10 as an upper electrode and a lower electrode 6 are arranged on both sides of an oxide film 36 provided under the metallic film 10, and an AC voltage is impressed on lead electrodes 25 and 26 which are integrally formed with the metallic film and the lower electrode 6 so as to vibrate the metellic film 10 at the time of transmitting the wave. At the time of wave-reception on the other hand, the generation of the AC voltage in the lead electrodes 25 and 26 by the vibration of the metallic film 10 is used. Thus, a highly sensitive, miniature and light integration ultrasonic transducer, which has less fluctuation in the characteristic, can be obtained.
JP22829187A 1987-09-14 1987-09-14 Ultrasonic transducer and its manufacture Granted JPS6472700A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22829187A JPS6472700A (en) 1987-09-14 1987-09-14 Ultrasonic transducer and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22829187A JPS6472700A (en) 1987-09-14 1987-09-14 Ultrasonic transducer and its manufacture

Publications (2)

Publication Number Publication Date
JPS6472700A true JPS6472700A (en) 1989-03-17
JPH0552120B2 JPH0552120B2 (en) 1993-08-04

Family

ID=16874166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22829187A Granted JPS6472700A (en) 1987-09-14 1987-09-14 Ultrasonic transducer and its manufacture

Country Status (1)

Country Link
JP (1) JPS6472700A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4865832A (en) * 1984-09-14 1989-09-12 Alps Electric Co., Ltd. Molybdenum oxide whiskers and a method of producing the same
JP2010507932A (en) * 2006-10-23 2010-03-11 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Symmetrically and selectively oriented random arrays for ultrasound therapy

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220600A (en) * 1985-03-26 1986-09-30 Nec Corp Ultrasonic wave sensor
JPS62149299A (en) * 1985-12-24 1987-07-03 Agency Of Ind Science & Technol Array type ultrasonic transducer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220600A (en) * 1985-03-26 1986-09-30 Nec Corp Ultrasonic wave sensor
JPS62149299A (en) * 1985-12-24 1987-07-03 Agency Of Ind Science & Technol Array type ultrasonic transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4865832A (en) * 1984-09-14 1989-09-12 Alps Electric Co., Ltd. Molybdenum oxide whiskers and a method of producing the same
JP2010507932A (en) * 2006-10-23 2010-03-11 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Symmetrically and selectively oriented random arrays for ultrasound therapy

Also Published As

Publication number Publication date
JPH0552120B2 (en) 1993-08-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term